Study on High Quality Thermal Stress Cleavage of Thick Sapphire Wafer
Oguchi, Kentaro, Ochi, Yuzo, Hosokawa, Akira, Hashimoto, Yohei, Koyano, Tomohiro, Furumoto, Tatsuaki, Kawabe, Tomoya, Chino, Yuji
Published in Key engineering materials (24.10.2019)
Published in Key engineering materials (24.10.2019)
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