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Published in Jpn J Appl Phys (01.02.2012)
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Published in Materials science in semiconductor processing (01.06.2013)
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Variation of Chemical Vapor Deposited SiO 2 Density Due to Generation and Shrinkage of Open Space During Thermal Annealing
Sometani, Mitsuru, Hasunuma, Ryu, Ogino, Masaaki, Kuribayashi, Hitoshi, Sugahara, Yoshiyuki, Uedono, Akira, Yamabe, Kikuo
Published in Japanese Journal of Applied Physics (01.02.2012)
Published in Japanese Journal of Applied Physics (01.02.2012)
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Year of Publication 22.10.2015
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
OGINO, MASAAKI, TACHIOKA, MASAAKI, NAKAJIMA, TSUNEHIRO, IGUCHI, KENICHI, NAKAZAWA, HARUO
Year of Publication 22.10.2015
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Year of Publication 22.10.2015
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
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Year of Publication 02.10.2014
Patent
Variation of Chemical Vapor Deposited SiO 2 Density Due to Generation and Shrinkage of Open Space During Thermal Annealing
Sometani, Mitsuru, Hasunuma, Ryu, Ogino, Masaaki, Kuribayashi, Hitoshi, Sugahara, Yoshiyuki, Uedono, Akira, Yamabe, Kikuo
Published in Japanese Journal of Applied Physics (01.02.2012)
Published in Japanese Journal of Applied Physics (01.02.2012)
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Journal Article