Electron Beam Direct Writing technology for LSI prototyping business
Machida, Yasuhide, Maruyama, Takashi, Kojima, Yoshinori, Sugatani, Shinji, Tsuchikawa, Haruo, Ogino, Kozo, Hoshino, Hiromi
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
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Journal Article
Conference Proceeding
Full-Chip Lithography Verification for Multilayer Structure in Electron-Beam Lithography
Ogino, Kozo, Hoshino, Hiromi, Arimoto, Hiroshi, Machida, Yasuhide
Published in Japanese Journal of Applied Physics (01.09.2007)
Published in Japanese Journal of Applied Physics (01.09.2007)
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Journal Article
Three-Dimensional Proximity Effect Correction for Multilayer Structures in Electron Beam Lithography
Ogino, Kozo, Hoshino, Hiromi, Machida, Yasuhide, Osawa, Morimi, Arimoto, Hiroshi, Maruyama, Takashi, Kawamura, Eiichi
Published in Japanese Journal of Applied Physics (01.06.2004)
Published in Japanese Journal of Applied Physics (01.06.2004)
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Journal Article
Evaluation of Performance of Proximity Effect Correction in Electron Projection Lithography
Osawa, Morimi, Ogino, Kozo, Hoshino, Hiromi, Machida, Yasuhide, Koba, Fumihiro, Yamashita, Hiroshi, Arimoto, Hiroshi
Published in Japanese Journal of Applied Physics (01.07.2005)
Published in Japanese Journal of Applied Physics (01.07.2005)
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Journal Article
High-Speed Proximity Effect Correction System for Electron-Beam Projection Lithography by Cluster Processing
Ogino, Kozo, Hoshino, Hiromi, Machida, Yasuhide, Osawa, Morimi, Arimoto, Hiroshi, Takahashi, Kimitoshi, Yamashita, Hiroshi
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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Journal Article
Fast and Simplified Technique of Proximity Effect Correction for Ultra Large Scale Integrated Circuit Patterns in Electron-Beam Projection Lithography
Ogino, Kozo, Hoshino, Hiromi, Machida, Yasuhide, Osawa, Morimi, Takahashi, Kimitoshi, Arimoto, Hiroshi
Published in Japanese Journal of Applied Physics (2002)
Published in Japanese Journal of Applied Physics (2002)
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Journal Article