CLEANING AGENT COMPOSITION AND METHOD FOR PRODUCING PROCESSED SEMICONDUCTOR SUBSTRATE
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Year of Publication 27.04.2023
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Novel Gap Filling BARC with High Chemical Resistance
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Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)
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Conference Proceeding
CLEANING AGENT COMPOSITION AND METHOD FOR PRODUCING PROCESSED SEMICONDUCTOR SUBSTRATE
YANAI, Masaki, OKUNO, Takahisa, OGATA, Hiroto, FUKUDA, Takuya, SHINJO, Tetsuya, OGINO, Hiroshi, MORIYA, Shunsuke
Year of Publication 08.02.2023
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Year of Publication 08.02.2023
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METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING PROCESSED SEMICONDUCTOR SUBSTRATE, AND RELEASE COMPOSITION
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Year of Publication 08.02.2023
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Year of Publication 08.02.2023
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RESIST UNDERLAYER FILM-FORMING COMPOSITION INCLUDING CYCLIC CARBONYL COMPOUND
NAKAJIMA, Makoto, OGATA, Hiroto, HASHIMOTO, Keisuke, TOKUNAGA, Hikaru
Year of Publication 29.04.2021
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Year of Publication 29.04.2021
Patent
RESIST UNDERLAYER FILM-FORMING COMPOSITION USING CARBON-OXYGEN DOUBLE BOND
NAKAJIMA, Makoto, OGATA, Hiroto, HASHIMOTO, Keisuke, TOKUNAGA, Hikaru
Year of Publication 22.04.2021
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Year of Publication 22.04.2021
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ADHESIVE COMPOSITION, LAMINATE AND METHOD FOR PRODUCING SAME, METHOD FOR PEELING LAMINATE, AND METHOD FOR PROCESSING SEMICONDUCTOR-FORMING SUBSTRATE
YANAI, Masaki, OGATA, Hiroto, OKUNO, Takahisa, SHINJO, Tetsuya, FUKUDA, Takuya, OGINO, Hiroshi, MORIYA, Shunsuke
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
Patent
ADHESIVE COMPOSITION, LAMINATE AND METHOD FOR PRODUCING SAME, METHOD FOR PEELING LAMINATE, AND METHOD FOR PROCESSING SEMICONDUCTOR-FORMING SUBSTRATE
YANAI, Masaki, OGATA, Hiroto, OKUNO, Takahisa, SHINJO, Tetsuya, FUKUDA, Takuya, OGINO, Hiroshi, MORIYA, Shunsuke
Year of Publication 02.11.2022
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Year of Publication 02.11.2022
Patent