Impact of Organic Contaminants from the Environment on Electrical Characteristics of Thin Gate Oxides
Ogata, Tamotsu, Ban, Cozy, Ueyama, Akemi, Muranaka, Seiji, Hayashi, Tomohiko, Kobayashi, Kiyoteru, Kobayashi, Junji, Kurokawa, Hiroshi, Ohno, Yoshikazu, Hirayama, Makoto
Published in Japanese Journal of Applied Physics (01.05.1998)
Published in Japanese Journal of Applied Physics (01.05.1998)
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Journal Article
Analysis of Anomalous Behavior during Negative Drain Input Operation of Fully Isolated nLDMOS
Sakai, Atsushi, Eikyu, Katsumi, Goto, Yotaro, Koshimizu, Makoto, Sonoda, Kenichiro, Ogata, Tamotsu
Published in 2021 33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD) (30.05.2021)
Published in 2021 33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD) (30.05.2021)
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Conference Proceeding
Impact of Thermal Nitridation on Microscopic Stress-Induced Leakage Current in Sub-10-nm Silicon Dioxides
Ogata, Tamotsu, Inoue, Masao, Nakamura, Tadashi, Tsuji, Naoki, Kobayashi, Kiyoteru, Kawase, Kazuo, Kurokawa, Hiroshi, Kaneoka, Tatsunori, Wake, Setsuo, Arima, Hideaki
Published in Japanese Journal of Applied Physics (2000)
Published in Japanese Journal of Applied Physics (2000)
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Journal Article
Mass Spectrometric and Kinetic Study of Low‐Pressure Chemical Vapor Deposition of Si3 N 4 Thin Films from SiH2Cl2 and NH 3
Sorita, Tetsuji, Satake, Tetsuya, Adachi, Hiroshi, Ogata, Tamotsu, Kobayashi, Kiyoteru
Published in Journal of the Electrochemical Society (01.12.1994)
Published in Journal of the Electrochemical Society (01.12.1994)
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Journal Article
High-quality CVD/thermal stacked gate oxide films with hydrogen-free CVD SiO2 formed in a SiCl4-N2O system
OGATA, T, KOBAYASHI, K, WATANABE, H, KUROKAWA, H, MATSUI, Y, HIRAYAMA, M
Published in Japanese journal of applied physics (1997)
Published in Japanese journal of applied physics (1997)
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Conference Proceeding
Kinetic study of silicon nitride growth from dichlorosilane and ammonia
OGATA, T, SORITA, T, KOBAYASHI, K, MATSUI, Y, HORIE, K, HIRAYAMA, M
Published in Japanese Journal of Applied Physics (1996)
Published in Japanese Journal of Applied Physics (1996)
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Journal Article