METHOD OF FORMING CONFORMAL METAL SILICIDE FILMS
TADA KUNIHIRO, YAMASAKI HIDEAKI, O'MEARA DAVID L, LEUSINK GERRIT J, HASEGAWA TOSHIO
Year of Publication 10.10.2014
Get full text
Year of Publication 10.10.2014
Patent
HEAT TREATING DEVICE
O'MEARA, DAVID L, SAITO, TAKANORI, EICKMANN, KARUKI, MAKIYA, TOSHIYUKI, DIP, ANTHONY, KAUSHAL, SANJEEV
Year of Publication 17.10.2002
Get full text
Year of Publication 17.10.2002
Patent
Double Patterning Method of Patterning a Substrate
Liu, Eric Chih-Fang, Lutker-Lee, Katie, Grzeskowiak, Jodi, Grzeskowiak, Steven, O'Meara, David L, Smith, Jeffrey
Year of Publication 14.03.2024
Get full text
Year of Publication 14.03.2024
Patent
Localized etch stop layer
Han, Yun, Hu, Shan, Sun, Xinghua, Tapily, Kandabara, O'Meara, David L, Metz, Andrew, Zhang, Henan
Year of Publication 20.12.2022
Get full text
Year of Publication 20.12.2022
Patent