CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
NELSON MICHAEL LEO, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, KOEVOETS ADRIANUS HENDRIK, O'CONNOR GEOFFREY, CHIEDA MICHAEL ANDREW, UITTERDIJK TAMMO, LAFARRE RAYMOND WILHELMUS LOUIS
Year of Publication 11.11.2019
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Year of Publication 11.11.2019
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Published in American Bar Association journal (01.12.1975)
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Published in American Bar Association journal (01.12.1975)
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Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
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Year of Publication 10.05.2022
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Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
Nelson, Michael Leo, Lafarre, Raymond Wilhelmus Louis, Koevoets, Adrianus Hendrik, O'Connor, Geoffrey, Chieda, Michael Andrew, Uitterdijk, Tammo, Van Der Sanden, Jacobus Cornelius Gerardus
Year of Publication 18.06.2019
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Year of Publication 18.06.2019
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CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
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Year of Publication 08.11.2018
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Year of Publication 08.11.2018
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CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
NELSON, Michael, Leo, CHIEDA, Michael, Andrew, KOEVOETS, Adrianus, Hendrik, UITTERDIJK, Tammo, VAN DER SANDEN, Jacobus, Cornelis, Gerardus, LAFARRE, Raymond, Wilhelmus, Louis, O'CONNOR, Geoffrey
Year of Publication 13.04.2017
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Year of Publication 13.04.2017
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CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
GEOFFREY O'CONNOR, ADRIANUS HENDRIK KOEVOETS, MICHAEL ANDREW CHIEDA, MICHAEL LEO NELSON, RAYMOND WILHELMUS LOUIS LAFARRE, TAMMO UITTERDIJK, JACOBUS CORNELIS GERARDUS VAN DER SANDEN
Year of Publication 11.04.2017
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Year of Publication 11.04.2017
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Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
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Year of Publication 11.07.2021
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