Large Area, 38 nm Half-Pitch Grating Fabrication by Using Atomic Spacer Lithography from Aluminum Wire Grids
Liu, Xiaoming, Deng, Xuegong, Sciortino, Paul, Buonanno, Mike, Walters, Frank, Varghese, Ron, Bacon, Joel, Chen, Lei, O'Brie, Nada, Wang, Jian Jim
Published in Nano letters (01.12.2006)
Published in Nano letters (01.12.2006)
Get full text
Journal Article