Microelectromechanical capacitors for RF applications
Nieminen, H, Ermolov, V, Nybergh, K, Silanto, S, Ryhänen, T
Published in Journal of micromechanics and microengineering (01.03.2002)
Published in Journal of micromechanics and microengineering (01.03.2002)
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Journal Article
Design of a temperature-stable RF MEM capacitor
Nieminen, H., Ermolov, V., Silanto, S., Nybergh, K., Ryhanen, T.
Published in Journal of microelectromechanical systems (01.10.2004)
Published in Journal of microelectromechanical systems (01.10.2004)
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Journal Article
Modeling the growth of PECVD silicon nitride films for crystalline silicon solar cells using factorial design and response surface methodology
Nybergh, K., Marjamaki, T., Skarp, E.
Published in Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997 (1997)
Published in Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997 (1997)
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Conference Proceeding