SPUTTERING CATHODE
NUMATA YUKINOBU, ENDO YOHEI, TANI NORIAKI, MATSUMOTO MASAHIRO, NAKAMUTA TAKESHI
Year of Publication 05.03.2020
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Year of Publication 05.03.2020
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FILM FORMING DEVICE AND FILM FORMING METHOD
SONODA KAZUHIRO, NUMATA YUKINOBU, HAMAGUCHI JUNICHI, ASAKAWA KEIICHIRO, KOKAZE YUTAKA
Year of Publication 17.04.2017
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Year of Publication 17.04.2017
Patent
SPUTTERING CATHODE
NUMATA YUKINOBU, KIM JUNG GUN, BYEON DONG BEOM, SO BYUNG HO, ENDO YOHEI, TANI NORIAKI, MATSUMOTO MASAHIRO, NAKAMUTA TAKESHI
Year of Publication 31.08.2020
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Year of Publication 31.08.2020
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3,6,7,8-TETRAHYDROCYCLOPENTA[e]INDOLE COMPOUND
TAKANO, Rieko, UMEZAKI, Yuma, ADITI, Agarwal, NAKAMURA, Hiroaki, IZUMI, Masanori, FUJII, Kunihiko, NUMATA, Yukinobu, YOSHIDA, Masao
Year of Publication 23.08.2018
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Year of Publication 23.08.2018
Patent
FILM FORMING DEVICE AND FILM FORMING METHOD
KOKAZE, Yutaka, HAMAGUCHI, Junichi, SONODA, Kazuhiro, ASAKAWA, Keiichiro, NUMATA, Yukinobu
Year of Publication 01.09.2016
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Year of Publication 01.09.2016
Patent
VACUUM TREATMENT APPARATUS AND RARE-GAS COLLECTION APPARATUS
NUMATA YUKINOBU, HIDAKA KOSUKE, FURUYA SHINJI, YAMAZAKI SHUICHI, MURAYAMA YOSHINOBU, KODAIRA SHUJI, MORIHIRA ATSUSHI
Year of Publication 17.05.2018
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Year of Publication 17.05.2018
Patent
SUBSTRATE PROCESSING APPARATUS
SONODA KAZUHIRO, NUMATA YUKINOBU, IWAHASHI TERUAKI, HIROISHI JOJI, ASAKAWA KEIICHIRO, KOKAZE YUTAKA
Year of Publication 22.12.2016
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Year of Publication 22.12.2016
Patent
Improved Step Coverage of Cu Seed Layers by Magnetic-Field-Assisted Ionized Sputtering
Sakamoto, Yuta, Kamada, Koukichi, Hamaguchi, Junichi, Sano, Akifumi, Numata, Yukinobu, Kodaira, Shuji, Toyoda, Satoru, Suu, Koukou
Published in Japanese Journal of Applied Physics (01.05.2011)
Published in Japanese Journal of Applied Physics (01.05.2011)
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Journal Article
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
SAKAMOTO YUTA, NUMATA YUKINOBU, HAMAGUCHI JUNICHI, HIROISHI JOJI, SUZUKI KOJI, SANO AKIFUMI, KODAIRA SHUJI, KADOKURA YOSHIYUKI, KAMADA KOUKICHI
Year of Publication 10.06.2014
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Year of Publication 10.06.2014
Patent
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
SAKAMOTO YUTA, NUMATA YUKINOBU, HAMAGUCHI JUNICHI, HIROISHI JOJI, SUZUKI KOJI, SANO AKIFUMI, KODAIRA SHUJI, KADOKURA YOSHIYUKI, KAMADA KOUKICHI
Year of Publication 12.09.2013
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Year of Publication 12.09.2013
Patent
SPUTTERING METHOD
HAMAGUCHI, JUNICHI, NUMATA, YUKINOBU, SANO, AKIFUMI, KAMADA, KOKICHI, SAKAMOTO, YUTA, TOYODA, SATORU, KODAIRA, SHUJI
Year of Publication 31.05.2012
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Year of Publication 31.05.2012
Patent