Scanning Magneto-optic Kerr effect microscope for inspection of MRAM manufacturing
Numata, Mitsunori, Kim, Ingi, Suzuki, Kenji, Ueyama, Shinji, Kim, Jinseob, Kim, Wookrae, Lee, Myungjun
Published in IEEE transactions on magnetics (01.11.2023)
Published in IEEE transactions on magnetics (01.11.2023)
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Journal Article
Multi spectral holographic ellipsometry for a complex 3D nanostructure
Jung, Jaehwang, Kim, Wookrae, Kim, Jinseob, Lee, Seungwoo, Shin, Inho, Yoon, Changhyeong, Jeong, Seoyeon, Hidaka, Yasuhiro, Numata, Mitsunori, Ueyama, Shinji, Choi, Changhoon, Lee, Myungjun
Published in Optics express (19.12.2022)
Published in Optics express (19.12.2022)
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Journal Article
INSPECTION DEVICE
SUZUKI KENJI, NUMATA MITSUNORI, ONISHI YOSHINORI, KAMIYAMA SHINJI, KIM IN GI
Year of Publication 27.06.2024
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Year of Publication 27.06.2024
Patent
IMAGING DEVICE AND IMAGING METHOD
KIM GUANG SU, NUMATA MITSUNORI, PARK SANBONG, OZAWA KEN, ISHIKAWA AKIO
Year of Publication 07.02.2019
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Year of Publication 07.02.2019
Patent
INSPECTION DEVICE
Ueyama, Shinji, SUZUKI, KENJI, Kim, Ingi, Numata, Mitsunori, Onishi, Tomoki
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
Patent