LOCAL EPITAXIAL GROWTH OF (103) ONE-AXIS-ORIENTED SrBi2Ta2O9 THIN FILMS PREPARED AT LOW DEPOSITION TEMPERATURE BY METALORGANIC CHEMICAL VAPOR DEPOSITION AND THEIR ELECTRICAL PROPERTIES
Nukaga, N, Mitsuya, M, Suzuki, T, Nishi, Y, Fujimoto, M, Funakubo, H
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 9B, pp. 5595-5598. 2001 (2001)
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 9B, pp. 5595-5598. 2001 (2001)
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Journal Article
LOW TEMPERATURE DIRECT CRYSTALLIZATION OF SrBi2(Ta1-xNbx)2O9 THIN FILMS BY THERMAL METALORGANIC CHEMICAL VAPOR DEPOSITION AND THEIR PROPERTIES
Mitsuya, M, Nukaga, N, Saito, K, Osada, M, Funakubo, H
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 5A, pp. 3337-3342. 2001 (01.01.2001)
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 40, no. 5A, pp. 3337-3342. 2001 (01.01.2001)
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Journal Article
MOCVD preparation of SBTN thin films from two organometallic sources bottles
Funaakubo, Hiroshi, Mitsuya, Masatoshi, Nukaga, Norimasa, Ishikawa, Katsuyuki
Published in Integrated ferroelectrics (01.10.2000)
Published in Integrated ferroelectrics (01.10.2000)
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Journal Article
PROPERTY IMPROVEMENT OF 75 NM-THICK DIRECTLY-CRYSTALLIZED SrBi2Ta2O9 THIN FILMS BY PULSE-INTRODUCED METALORGANIC CHEMICAL VAPOR DEPOSITION AT LOW TEMPERATURE
Mitsuya, M, Nukaga, N, Watanabe, T, Funakubo, H, Saito, K
Published in Jpn.J.Appl.Phys ,Part 2. Vol. 40, no. 7B, pp. L758-L760. 2001 (01.01.2001)
Published in Jpn.J.Appl.Phys ,Part 2. Vol. 40, no. 7B, pp. L758-L760. 2001 (01.01.2001)
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Journal Article
Preparation of Bi-layered ferroelectric thin film by thernal MOCVD
Funakubo, Hiroshi, Nukaga, Norimasa, Ishikawa, Katsuyuki, Kokubun, Hiroshi, Machida, Hideaki, Shinozaki, Kazuo, Mizutani, Nobuysau
Published in Ferroelectrics (01.06.1999)
Published in Ferroelectrics (01.06.1999)
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Journal Article
Low-Temperature Preparation of SrBi 2 Ta 2 O 9 Thin Films by Electron Cyclotron Resonance Plasma-Enhanced Metalorganic Chemical Vapor Deposition and Their Electrical Properties
Nukaga, Norimasa, Mitsuya, Masatoshi, Funakubo, Hiroshi
Published in Japanese Journal of Applied Physics (01.09.2000)
Published in Japanese Journal of Applied Physics (01.09.2000)
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Journal Article
Effect of Deposition Temperature and Composition on the Microstructure and Electrical Property of SrBi 2 Ta 2 O 9 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
Nukaga, Norimasa, Ishikawa, Katsuyuki, Funakubo, Hiroshi
Published in Japanese Journal of Applied Physics (01.09.1999)
Published in Japanese Journal of Applied Physics (01.09.1999)
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Journal Article
Property Improvement of 75 nm-thick Directly-crystallized SrBi 2 Ta 2 O 9 Thin Films by Pulse-introduced Metalorganic Chemical Vapor Deposition at Low Temperature
Mitsuya, Masatoshi, Nukaga, Norimasa, Watanabe, Takayuki, Funakubo, Hiroshi, Saito, Keisuke
Published in Japanese Journal of Applied Physics (01.07.2001)
Published in Japanese Journal of Applied Physics (01.07.2001)
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Journal Article
Low Temperature Direct Crystallization of SrBi 2 (Ta 1-x Nb x ) 2 O 9 Thin Films by Thermal Metalorganic Chemical Vapor Deposition and Their Properties
Mitsuya, Masatoshi, Nukaga, Norimasa, Saito, Keisuke, Osada, Minoru, Funakubo, Hiroshi
Published in Japanese Journal of Applied Physics (01.05.2001)
Published in Japanese Journal of Applied Physics (01.05.2001)
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Journal Article
Direct Crystallization and Characterization of Bi 3 TiTaO 9 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
Suzuki, Muneyasu, Nagata, Hajime, Nukaga, Norimasa, Watanabe, Takayuki, Funakubo, Hiroshi, Takenaka, Tadashi
Published in Japanese Journal of Applied Physics (30.11.2002)
Published in Japanese Journal of Applied Physics (30.11.2002)
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Journal Article
Preparation and Characterization of SrBi 2 (Ta 1-x Nb x ) 2 O 9 Thin Films by Metalorganic Chemical Vapor Deposition from Two Organometallic Source Bottles
Mitsuya, Masatoshi, Ishikawa, Katsuyuki, Nukaga, Norimasa, Funakubo, Hiroshi
Published in Japanese Journal of Applied Physics (01.06.2000)
Published in Japanese Journal of Applied Physics (01.06.2000)
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Journal Article
Property improvement of srbi 2 ta 2 o 9 thin films prepared at 600°c by pulse-mocvd
Funakubo, Hiroshi, Mitsuya, Masatoshi, Watanabe, Takayuki, Nukaga, Norimasa
Published in Integrated ferroelectrics (01.01.2001)
Published in Integrated ferroelectrics (01.01.2001)
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Journal Article