Synthesis of arbitrary pulse waveforms in QCL-seeded ns-pulse CO 2 laser for optimization of an LPP EUV source
Nowak, Krzysztof M, Kurosawa, Yoshiaki, Suganuma, Takashi, Kawasuji, Yasufumi, Nakarai, Hiroaki, Saito, Takashi, Fujimoto, Junichi, Mizoguchi, Hakaru
Published in Optics letters (01.07.2016)
Published in Optics letters (01.07.2016)
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Journal Article
Multiline short-pulse solid-state seeded carbon dioxide laser for extreme ultraviolet employing multipass radio frequency excited slab amplifier
Nowak, Krzysztof M, Ohta, Takeshi, Suganuma, Takashi, Fujimoto, Junichi, Mizoguchi, Hakaru
Published in Optics letters (15.03.2013)
Published in Optics letters (15.03.2013)
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Journal Article
Efficient multiline nanosecond pulse amplification in planar waveguide CO₂ amplifier for extreme UV laser-produced plasma source
Nowak, Krzysztof M, Ohta, Takeshi, Suganuma, Takashi, Fujimoto, Junichi, Mizoguchi, Hakaru, Sumitani, Akira, Endo, Akira
Published in Optics letters (01.04.2014)
Published in Optics letters (01.04.2014)
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Journal Article
Spectral characteristics of quantum-cascade laser operating at 10.6 μm wavelength for a seed application in laser-produced-plasma extreme UV source
Nowak, Krzysztof M, Ohta, Takeshi, Suganuma, Takashi, Yokotsuka, Toshio, Fujimoto, Junichi, Mizoguchi, Hakaru, Endo, Akira
Published in Optics letters (15.11.2012)
Published in Optics letters (15.11.2012)
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Journal Article
Wavefront measurement of single-mode quantum cascade laser beam for seed application in laser-produced plasma extreme ultraviolet system
Nowak, Krzysztof M, Ohta, Takeshi, Suganuma, Takashi, Yokotsuka, Toshio, Fujimoto, Junichi, Mizoguchi, Hakaru
Published in Optics letters (01.12.2012)
Published in Optics letters (01.12.2012)
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Journal Article
Performance of 100-W HVM LPP-EUV source
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M., Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Yamazaki, Taku, Okazaki, Shinji, Saitou, Takashi
Published in Advanced optical technologies (01.08.2015)
Published in Advanced optical technologies (01.08.2015)
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Journal Article
High power LPP-EUV source with long collector mirror lifetime for high volume semiconductor manufacturing
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M, Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Yamazaki, Taku, Saitou, Takashi
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
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Conference Proceeding
Development of 250W EUV light source for HVM lithography
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M., Kawasuji, Yasufumi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Yamada, Tsuyoshi, Yamazaki, Taku, Okazaki, Shinji, Saitou, Takashi
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
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Conference Proceeding
Analytical model for CO(2) laser ablation of fused quartz
Nowak, Krzysztof M, Baker, Howard J, Hall, Denis R
Published in Applied optics. Optical technology and biomedical optics (10.10.2015)
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Published in Applied optics. Optical technology and biomedical optics (10.10.2015)
Journal Article
Development of 250W EUV light source for HVM lithography
Yamazaki, Taku, Nakarai, Hiroaki, Abe, Tamotsu, Nowak, Krzysztof M., Kawasuji, Yasufumi, Okamoto, Takeshi, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Yamagida, Tatsuya, Shiraishi, Yutaka, Saitou, Takashi, Mizoguchi, Hakaru
Published in 2017 China Semiconductor Technology International Conference (CSTIC) (01.03.2017)
Published in 2017 China Semiconductor Technology International Conference (CSTIC) (01.03.2017)
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Conference Proceeding