New precursors for CVD copper metallization
Norman, John A.T., Perez, Melanie, Schulz, Stefan E., Waechtler, Thomas
Published in Microelectronic engineering (01.10.2008)
Published in Microelectronic engineering (01.10.2008)
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Journal Article
Conference Proceeding
New Volatile Strontium and Barium Imidazolate Complexes for the Deposition of Group 2 Metal Oxides
Norman, John A. T, Perez, Melanie, Kim, M. S, Lei, Xinjian, Ivanov, Sergei, Derecskei-Kovacs, Agnes, Matz, Laura, Buchanan, Iain, Rheingold, Arnold L
Published in Inorganic chemistry (19.12.2011)
Published in Inorganic chemistry (19.12.2011)
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Journal Article
Computational Study on the Relative Reactivities of Cobalt and Nickel Amidinates via β-H Migration
Wu, Jinping, Li, Jiaye, Zhou, Chenggang, Lei, Xinjian, Gaffney, Thomas, Norman, John A. T, Li, Zhengwen, Gordon, Roy, Cheng, Hansong
Published in Organometallics (21.05.2007)
Published in Organometallics (21.05.2007)
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Journal Article
Evaluation of a novel unfluorinated copper precursor for chemical vapor deposition
Song, Haizheng, Norman, John A.T., Shimogaki, Yukihiro
Published in Microelectronic engineering (01.03.2010)
Published in Microelectronic engineering (01.03.2010)
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Journal Article
Conference Proceeding
Ab Initio Molecular Dynamics Simulation on the Aggregation of a Cu Monolayer on a WN(001) Surface
Han, Bo, Wu, Jinping, Zhou, Chenggang, Li, Jiaye, Lei, Xinjian, Norman, John A. T, Gaffney, Thomas R, Gordon, Roy, Roberts, David A, Cheng, Hansong
Published in Journal of physical chemistry. C (03.07.2008)
Published in Journal of physical chemistry. C (03.07.2008)
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Journal Article
Density Function Theory Study of Copper Agglomeration on the WN(001) Surface
Wu, Jinping, Han, Bo, Zhou, Chenggang, Lei, Xinjian, Gaffney, Thomas R, Norman, John A. T, Li, Zhengwen, Gordon, Roy, Cheng, Hansong
Published in Journal of physical chemistry. C (05.07.2007)
Published in Journal of physical chemistry. C (05.07.2007)
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Journal Article
Methods For Depositing Metal Films On Diffusion Barrier Layers By CVD Processes
GARG DIWAKAR, CHENG HANSONG, ORDEJON PABLO, NORMAN JOHN A.T, MACHADO EDUARDO
Year of Publication 27.03.2008
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Year of Publication 27.03.2008
Patent
Diffusion Barrier Layers and Methods Comprising for Depositing Metal Films by CVD or ALD Processes
GARG DIWAKAR, CHENG HANSONG, ORDEJON PABLO, NORMAN JOHN A.T, MACHADO EDUARDO
Year of Publication 16.08.2007
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Year of Publication 16.08.2007
Patent