Fabrication of ultra-fine vias in low CTE Build-up Films using a novel dry etching technology
Morikawa, Yasuhiro, Sato, Muneyuki, Sakao, Yosuke, Fujinaga, Tetsushi, Tani, Noriaki, Saito, Kazuya
Published in 2015 IEEE 65th Electronic Components and Technology Conference (ECTC) (01.05.2015)
Published in 2015 IEEE 65th Electronic Components and Technology Conference (ECTC) (01.05.2015)
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Conference Proceeding
Preparation of (Pb, La) (Zr, Ti)O3 ferroelectric films by RF sputtering on large substrate
SUU, K, OSAWA, A, TANI, N, ISHIKAWA, M, NAKAMURA, K, OZAWA, T, SAMESHIMA, K, KAMISAWA, A, TAKASU, H
Published in Japanese journal of applied physics (1996)
Published in Japanese journal of applied physics (1996)
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Conference Proceeding
A new perpendicular magnetic film of Co-O evaporation
NAKAMURA, K, TANI, N, ISHIKAWA, M, YAMADA, T, OTA, Y, ITOH, A
Published in Japanese Journal of Applied Physics (01.06.1984)
Published in Japanese Journal of Applied Physics (01.06.1984)
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Conference Proceeding
Journal Article
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
IHORI, Atsuhito, TANI, Noriaki, IWAI, Harunori, FUJINAGA, Tetsushi, KOBAYASHI, Yousuke
Year of Publication 13.10.2021
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Year of Publication 13.10.2021
Patent
Film-forming apparatus and film-forming method
Ihori, Atsuhito, Kobayashi, Yousuke, Iwai, Harunori, Tani, Noriaki, Fujinaga, Tetsushi
Year of Publication 07.09.2021
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Year of Publication 07.09.2021
Patent
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
IHORI, Atsuhito, TANI, Noriaki, IWAI, Harunori, FUJINAGA, Tetsushi, KOBAYASHI, Yousuke
Year of Publication 06.11.2019
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Year of Publication 06.11.2019
Patent
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
IHORI, Atsuhito, TANI, Noriaki, IWAI, Harunori, FUJINAGA, Tetsushi, KOBAYASHI, Yousuke
Year of Publication 06.02.2019
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Year of Publication 06.02.2019
Patent
High aspect ratio TSV etching process for high-capacitor
Murayama, Takahide, Sakuishi, Toshiyuki, Morikawa, Yasuhiro, Tani, Noriaki, Saitou, Kazuya
Published in IEEE CPMT Symposium Japan 2014 (01.11.2014)
Published in IEEE CPMT Symposium Japan 2014 (01.11.2014)
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Conference Proceeding
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
Ihori, Atsuhito, Kobayashi, Yousuke, Iwai, Harunori, Tani, Noriaki, Fujinaga, Tetsushi
Year of Publication 13.12.2018
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Year of Publication 13.12.2018
Patent
Film formation method and film formation apparatus
Yoshida Takashi, Matsumoto Masahiro, Ikeda Susumu, Tani Noriaki, Kubo Masashi
Year of Publication 27.02.2018
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Year of Publication 27.02.2018
Patent
Touch panel, method of manufacturing touch panel, and optical thin film
Suzuki, Toshihiro, Matsumoto, Masahiro, Yanagitsubo, Hidenori, Kubo, Masashi, Harada, Manabu, Ihori, Atsuhito, Tani, Noriaki
Year of Publication 01.10.2019
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Year of Publication 01.10.2019
Patent
TWI776802B
KOBAYASHI, YOUSUKE, IWAI, HARUNORI, FUJINAGA, TETSUSHI, IHORI, ATSUHITO, TANI, NORIAKI
Year of Publication 11.09.2022
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Year of Publication 11.09.2022
Patent
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
FUJINAGA Tetsushi, TANI Noriaki, MATSUMOTO Masahiro, IHORI Atsuhito, IWAI Harunori
Year of Publication 20.07.2017
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Year of Publication 20.07.2017
Patent
SUBSTRATE PROCESSING DEVICE
FUJINAGA Tetsushi, TANI Noriaki, MATSUMOTO Masahiro, IHORI Atsuhito, IWAI Harunori
Year of Publication 20.07.2017
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Year of Publication 20.07.2017
Patent
SUBSTRATE PROCESSING DEVICE
FUJINAGA Tetsushi, TANI Noriaki, MATSUMOTO Masahiro, IHORI Atsuhito, IWAI Harunori, SATO Yoshinao, IWATA Kenji
Year of Publication 11.01.2018
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Year of Publication 11.01.2018
Patent