MeV ion exposure behaviour of PMMA resist polymer studied by synchrotron light spectroscopies
Norarat, Rattanaporn, Jainontee, Karuna, Thianthaisong, Wanlapaporn, Sriwang, Sukonlaphat, Nakajima, Hideki, Chienthavorn, Orapin, Guibert, Edouard, Whitlow, Harry J.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2017)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.08.2017)
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Journal Article
Lithography exposure characteristics of poly(methyl methacrylate) (PMMA) for carbon, helium and hydrogen ions
Puttaraksa, Nitipon, Norarat, Rattanaporn, Laitinen, Mikko, Sajavaara, Timo, Singkarat, Somsorn, Whitlow, Harry J.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.02.2012)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.02.2012)
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Journal Article
A gas ionisation Direct-STIM detector for MeV ion microscopy
Norarat, Rattanaporn, Guibert, Edouard, Jeanneret, Patrick, Dellea, Mario, Jenni, Josef, Roux, Adrien, Stoppini, Luc, Whitlow, Harry J.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2015)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.04.2015)
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Journal Article
MeV ion beam lithography of biocompatible halogenated Parylenes using aperture masks
Whitlow, Harry J., Norarat, Rattanaporn, Roccio, Marta, Jeanneret, Patrick, Guibert, Edouard, Bergamin, Maxime, Fiorucci, Gianni, Homsy, Alexandra, Laux, Edith, Keppner, Herbert, Senn, Pascal
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.07.2015)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.07.2015)
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Journal Article
Objective improvement of the visual quality of ion microscope images
Norarat, Rattanaporn, Whitlow, Harry J., Ren, Minqin, Osipowicz, Thomas, van Kan, Jeroen A., Timonen, Jussi, Watt, Frank
Published in Microelectronic engineering (01.02.2013)
Published in Microelectronic engineering (01.02.2013)
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Journal Article
Why are hydrogen ions best for MeV ion beam lithography?
Norarat, Rattanaporn, Puttaraksa, Nitipon, Napari, Mari, Ananda Sagari, A.R., Laitinen, Mikko, Sajavaara, Timo, Yotprayoonsak, Peerapong, Pettersson, Mika, Chienthavorn, Orapin, Whitlow, Harry J.
Published in Microelectronic engineering (01.02.2013)
Published in Microelectronic engineering (01.02.2013)
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Journal Article
Development of the Jyvaeskylae microbeam facility
Norarat, Rattanaporn, Sajavaara, Timo, Laitinen, Mikko, Heikkinen, Pauli, Ranttila, Kimmo, Ylikorkala, Kari, Haenninen, Vaeino, Rossi, Mikko, Jones, Pete, Marjomaeki, Varpu, Gilbert, Leona, Whitlow, Harry J
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.02.2012)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.02.2012)
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Journal Article
Development of the Jyväskylä microbeam facility
Norarat, Rattanaporn, Sajavaara, Timo, Laitinen, Mikko, Heikkinen, Pauli, Ranttila, Kimmo, Ylikorkala, Kari, Hänninen, Väinö, Rossi, Mikko, Jones, Pete, Marjomäki, Varpu, Gilbert, Leona, Whitlow, Harry J.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.02.2012)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.02.2012)
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Journal Article
Advanced time-stamped total data acquisition control front-end for MeV ion beam microscopy and proton beam writing
Kivistö, Henri, Rossi, Mikko, Jones, Pete, Norarat, Rattanaporn, Puttaraksa, Nitipon, Sajavaara, Timo, Laitinen, Mikko, Hänninen, Väinö, Ranttila, Kimmo, Heikkinen, Pauli, Gilbert, Leona, Marjomäki, Varpu, Whitlow, Harry J.
Published in Microelectronic engineering (01.02.2013)
Published in Microelectronic engineering (01.02.2013)
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Journal Article
Objective improvement of the visual quality of ion microscope images : Nanoscale Imaging, Fabrication and Materials Modifications using Ion Beams
NORARAT, Rattanaporn, WHITLOW, Harry J, REN, Minqin, OSIPOWICZ, Thomas, KAN, Jeroen A. Van, TIMONEN, Jussi, WATT, Frank
Published in Microelectronic engineering (2013)
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Published in Microelectronic engineering (2013)
Conference Proceeding
Why are hydrogen ions best for MeV ion beam lithography? : Nanoscale Imaging, Fabrication and Materials Modifications using Ion Beams
NORARAT, Rattanaporn, PUTTARAKSA, Nitipon, NAPARI, Mari, ANANDA SAGARI, A. R, LAITINEN, Mikko, SAJAVAARA, Timo, YOTPRAYOONSAK, Peerapong, PETTERSSON, Mika, CHIENTHAVORN, Orapin, WHITLOW, Harry J
Published in Microelectronic engineering (2013)
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Published in Microelectronic engineering (2013)
Conference Proceeding
Advanced time-stamped total data acquisition control front-end for MeV ion beam microscopy and proton beam writing : Nanoscale Imaging, Fabrication and Materials Modifications using Ion Beams
KIVISTÖ, Henri, ROSSI, Mikko, GILBERT, Leona, MARJOMÄKI, Varpu, WHITLOW, Harry J, JONES, Pete, NORARAT, Rattanaporn, PUTTARAKSA, Nitipon, SAJAVAARA, Timo, LAITINEN, Mikko, HÄNNINEN, Vaino, RANTTILA, Kimmo, HEIKKINEN, Pauli
Published in Microelectronic engineering (2013)
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Published in Microelectronic engineering (2013)
Conference Proceeding