Electrostatic chuck having thermally isolated zones with minimal crosstalk
Makhratchev, Konstantin, Della Rosa, Jason, Buchberger, Jr., Douglas A, Noobakhsh, Hamid, Parkhe, Vijay D, Mays, Brad L
Year of Publication 10.08.2021
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Year of Publication 10.08.2021
Patent
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CROSSTALK
Makhratchev, Konstantin, Della Rosa, Jason, Noobakhsh, Hamid, Buchberger, JR., Douglas A, Parkhe, Vijay D, Mays, Brad L
Year of Publication 12.09.2019
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Year of Publication 12.09.2019
Patent
PLASMA RESISTANT CERAMIC COATED CONDUCTIVE ARTICLE
NOOBAKHSH HAMID, LUBOMIRSKY DMITRY, DUAN REN-GUAN, YUH JUNHAN, KANUNGO BIRAJA P, SUN JENNIFER Y
Year of Publication 31.10.2013
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Year of Publication 31.10.2013
Patent