SEMICONDUCTOR MEMORY DEVICE
NOMACHI, Akiko, NAGASHIMA, Hidenobu, MATSUDA, Toru, ISHIDA, Tatsuya, OKUMURA, Yusuke
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
Patent
Pattern Dependence of Epitaxial-Realignment in Direct Silicon Bonded (DSB) Substrates with Hybrid Crystal Orientation
Itokawa, Hiroshi, Nomachi, Akiko, Yasutake, Nobuaki, Ishida, Tatsuya, Fukushima, Takashi, Harakawa, Hideaki, Kawase, Yoshimasa, Azuma, Atsushi, Mizushima, Ichiro
Published in ECS transactions (24.10.2008)
Published in ECS transactions (24.10.2008)
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Journal Article