Zinc oxide thin films: Characterization and potential applications
O'Brien, Shane, Nolan, Mark G., Çopuroglu, Mehmet, Hamilton, Jeff A., Povey, Ian, Pereira, Luis, Martins, Rodrigo, Fortunato, Elvira, Pemble, Martyn
Published in Thin solid films (01.06.2010)
Published in Thin solid films (01.06.2010)
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Conference Proceeding
The effect of dopants on the morphology, microstructure and electrical properties of transparent zinc oxide films prepared by the sol-gel method
O'Brien, Shane, Çopuroglu, Mehmet, Tassie, Paul, Nolan, Mark G., Hamilton, Jeff A., Povey, Ian, Pereira, Luis, Martins, Rodrigo, Fortunato, Elvira, Pemble, Martyn E.
Published in Thin solid films (01.12.2011)
Published in Thin solid films (01.12.2011)
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Conference Proceeding
ALD ZrO2 processes for BEoL device applications
Weinreich, Wenke, Seidel, Konrad, Polakowski, Patrick, Riedel, Stefan, Wilde, Lutz, Triyoso, Dina H., Nolan, Mark G.
Published in 2014 IEEE International Conference on IC Design & Technology (01.05.2014)
Published in 2014 IEEE International Conference on IC Design & Technology (01.05.2014)
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Conference Proceeding
Understanding the materials, electrical and reliability impact of Al-addition to ZrO2 for BEOL compatible MIM capacitors
Triyoso, Dina H., Chu, Sanford, Seidel, Konrad, Weinreich, Wenke, Kok-Yong Yiang, Nolan, Mark G., Brunco, David P., Rinderknecht, Jochen, Utess, Dirk, Kyono, Carl, Miller, Rod, Jeasung Park, Lili Cheng, Liebau, Maik, Lomtscher, Patrick, Fox, Robert
Published in Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2014)
Published in Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2014)
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