Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors
Matsukuma, Hiraku, Adachi, Keisuke, Sugawara, Takuma, Shimizu, Yuki, Gao, Wei, Niwa, Eiji, Sasaki, Yoshihiro
Published in Nanomanufacturing and metrology (01.03.2021)
Published in Nanomanufacturing and metrology (01.03.2021)
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Journal Article
A Cr-N thin film displacement sensor for precision positioning of a micro-stage
Peng, Yuxin, Ito, So, Shimizu, Yuki, Azuma, Toyohiro, Gao, Wei, Niwa, Eiji
Published in Sensors and actuators. A. Physical. (01.05.2014)
Published in Sensors and actuators. A. Physical. (01.05.2014)
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Journal Article