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Integration of silicon nanowire bridges in microtrenches with perpendicular bottom-up growth promoted by surface nanoholes

by Uesugi, Akio, Nishiyori, Shusuke, Nakagami, Tatsuya, Sugano, Koji, Isono, Yoshitada
Published in Japanese Journal of Applied Physics (01.07.2022)

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Journal Article

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Evaluation of Thermoelectric Properties of Monolithically-Integrated Core-Shell Si Nanowire Bridges

by Uesugi, Akio, Nishiyori, Shusuke, Sugano, Koji, Isono, Yoshitada
Published in 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) (15.01.2023)

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Conference Proceeding

Integration of silicon nanowire bridges in microtrenches with perpendicular bottom-up growth promoted by surface nanoholes

Evaluation of Thermoelectric Properties of Monolithically-Integrated Core-Shell Si Nanowire Bridges

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