Plasma-chemical deposition of diamond-like coatings in capacitively coupled RF plasma in toluene
Zadiriev, I I, Nikonov, A M, Kralkina, E A, Vavilin, K V
Published in Journal of physics. Conference series (01.12.2022)
Published in Journal of physics. Conference series (01.12.2022)
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Journal Article
Pulsed Inductive RF Discharge as an Effective Working Process of an RF Ion Source
Zadiriev, I. I., Kralkina, E. A., Vavilin, K. V., Nikonov, A. M., Shvidkiy, G. V.
Published in Plasma physics reports (01.11.2023)
Published in Plasma physics reports (01.11.2023)
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Journal Article
Characteristics of Capacitive RF Discharge in a Magnetic Field with a Predominant Radial Component
Shvydkiy, G. V., Zadiriev, I. I., Vavilin, K. V., Kralkina, E. A., Nikonov, A. M.
Published in Technical physics (01.05.2024)
Published in Technical physics (01.05.2024)
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Journal Article
Physical Features of the Particle Flow Created by a Low-Power Helicon Plasma Source
Zadiriev, I. I., Vavilin, K. V., Kralkina, E. A., Nikonov, A. M., Shvydky, G. V.
Published in Plasma physics reports (01.09.2022)
Published in Plasma physics reports (01.09.2022)
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Journal Article
Electric properties of carbon films deposited by magnetron sputtering with ion assistance
Grushin, M A, Kral'kina, E A, Neklyudova, P A, Nikonov, A M
Published in Journal of physics. Conference series (01.10.2019)
Published in Journal of physics. Conference series (01.10.2019)
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Journal Article
Surface Preparation as a Step in the Fabrication of Biosensors Based on Silicon Nanowire Field-Effect Transistors: Review
Nikonov, A. M., Naumova, O. V., Generalov, V. M., Safatov, A. S., Fomin, B. I.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.03.2020)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.03.2020)
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Journal Article
Hybrid plasma system for magnetron deposition of coatings with ion assistance
Vavilin, K V, Kralkina, E A, Nekludova, P A, Petrov, A. K, Nikonov, A M, Pavlov, V B, Airapetov, A A, Odinokov, V V, Pavlov, G Ya, Sologub, V A
Published in Journal of physics. Conference series (14.01.2016)
Published in Journal of physics. Conference series (14.01.2016)
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Journal Article
Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field
Aleksandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.
Published in Journal of communications technology & electronics (01.04.2018)
Published in Journal of communications technology & electronics (01.04.2018)
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Journal Article
Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System
Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kralkina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Ayrapetov, A. A., Odinokov, V. V., Sologub, V. A., Pavlov, G. Ya
Published in Plasma physics reports (2017)
Published in Plasma physics reports (2017)
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Journal Article
Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system
Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kralkina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Ayrapetov, A. A., Odinokov, V. V., Sologub, V. A., Pavlov, G. Ya
Published in Plasma physics reports (01.03.2016)
Published in Plasma physics reports (01.03.2016)
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Journal Article
Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system
Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.
Published in Russian microelectronics (01.11.2016)
Published in Russian microelectronics (01.11.2016)
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Journal Article
Selection of Substrate Material for Protein Arrays
Poltavchenko, A. G., Zaitsev, B. N., Ersh, A. V., Taranov, O. S., Korneev, D. V., Nikonov, A. M.
Published in Protection of metals and physical chemistry of surfaces (01.03.2016)
Published in Protection of metals and physical chemistry of surfaces (01.03.2016)
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Journal Article
Erratum to: “Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system”
Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya, Sologub, V. A.
Published in Russian microelectronics (2017)
Published in Russian microelectronics (2017)
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Journal Article