IMRE, BIM and SUPER using patternwise esterification
Mutsaers, C.M.J., Vollenbroek, F.A., Nijssen, W.P.M., Visser, R.J.
Published in Microelectronic engineering (1990)
Published in Microelectronic engineering (1990)
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Journal Article
Conference Proceeding
High resolution optical lithography by formation of a built on mask (B.O.M.)
Vollenbroek, F.A., Nijssen, W.P.M., Kroon, H.J.J., Yilmaz, B.
Published in Microelectronic engineering (01.12.1985)
Published in Microelectronic engineering (01.12.1985)
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Journal Article