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Year of Publication 11.11.2020
Patent
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AJI PRASHANT, LI SHIFANG, SCHWITALLA SVEN, NICOLAIDES LENA, WEN YOUXIAN
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Impact of inactive dopants in chemical vapor deposition layers on photomodulated optical reflectance
Bogdanowicz, Janusz, Dortu, Fabian, Clarysse, Trudo, Vandervorst, Wilfried, Shaughnessy, Derrick, Salnik, Alex, Nicolaides, Lena
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Advanced Dopant Metrology for 45 nm and Beyond
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Conference Proceeding
Theoretical, experimental, and computational aspects of optical property determination of turbid media by using frequency-domain laser infrared photothermal radiometry
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Published in Journal of the Optical Society of America. A, Optics, image science, and vision (01.10.2001)
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Journal Article