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Year of Publication 15.05.2001
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Year of Publication 15.05.2001
Patent
SPUTTERING CHAMBER SHIELD PROMOTING RELIABLE PLASMA IGNITION
SU JINGANG, NGAN KENNY KING-TAI, YANG LISA L, YEE NELSON A, FORSTER JOHN C
Year of Publication 15.05.2001
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Year of Publication 15.05.2001
Patent