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Year of Publication 24.05.2022
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Year of Publication 21.03.2023
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Year of Publication 06.10.2022
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Year of Publication 03.08.2022
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Year of Publication 11.02.2021
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Year of Publication 11.02.2021
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LITHOGRAPHY SIMULATION AND OPTICAL PROXIMITY CORRECTION
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Year of Publication 01.04.2021
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LITHOGRAPHY SIMULATION AND OPTICAL PROXIMITY CORRECTION
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Year of Publication 25.03.2021
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Year of Publication 25.03.2021
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Year of Publication 16.01.2023
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Year of Publication 01.07.2021
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DOUBLE EXPOSURE PATTERNING BY CARBONACEOUS HARD MASK
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Year of Publication 05.12.2013
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Double exposure patterning with carbonaceous hardmask
Chen, Hui W, Chang, Chorng-Ping, Chen, Yongmei, Dai, Huixiong, Yu, Jiahua, Yang, Susie X, Xu, Xumou, Bencher, Christopher D, Hung, Raymond Hoiman, Duane, Michael P, Ngai, Christopher Siu Wing, Shu, Jen, MacWilliams, Kenneth
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Year of Publication 23.10.2012
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Double exposure patterning with carbonaceous hardmask
CHEN YONGMEI, DAI HUIXIONG, CHANG CHORNG-PING, XU XUMOU, CHEN HUI W, SHU JEN, HUNG RAYMOND HOIMAN, YU JIAHUA, NGAI CHRISTOPHER SIU WING, MACWILLIAMS KENNETH, BENCHER CHRISTOPHER D, DUANE MICHAEL P, YANG SUSIE X
Year of Publication 23.10.2012
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Year of Publication 23.10.2012
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