IMPROVED INJECTOR FOR SPATIALLY SEPARATED ATOMIC LAYER DEPOSITION CHAMBER
GRIFFIN KEVIN, TOBIN JEFF, LIU PATRICIA M, YUDOVSKY JOSEPH, MILLER AARON, SATO TATSUYA E, NEWMAN ERAN
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Year of Publication 01.08.2016
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Improved syringe for spatially separated atomic layer deposition chamber
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Year of Publication 27.02.2024
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Injector For Spatially Separated Atomic Layer Deposition Chamber
Yudovsky Joseph, Liu Patricia M, Tobin Jeff, Newman Eran, Sato Tatsuya E, Griffin Kevin, Miller Aaron
Year of Publication 28.07.2016
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Year of Publication 28.07.2016
Patent
IMPROVED INJECTOR FOR SPATIALLY SEPARATED ATOMIC LAYER DEPOSITION CHAMBER
TOBIN, JEFF, GRIFFIN, KEVIN, YUDOVSKY, JOSEPH, NEWMAN, ERAN, LIU, PATRICIA M, MILLER, AARON, SATO, TATSUYA E
Year of Publication 28.07.2016
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Year of Publication 28.07.2016
Patent
Improved injector for spatially separated atomic layer deposition chamber
GRIFFIN KEVIN, TOBIN JEFF, LIU PATRICIA M, YUDOVSKY JOSEPH, MILLER AARON, SATO TATSUYA E, NEWMAN ERAN
Year of Publication 26.09.2017
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Year of Publication 26.09.2017
Patent
Improved injector for spatially separated atomic layer deposition chamber
TOBIN, JEFF, GRIFFIN, KEVIN, YUDOVSKY, JOSEPH, NEWMAN, ERAN, LIU, PATRICIA M, MILLER, AARON, SATO, TATSUYA E
Year of Publication 01.10.2016
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Year of Publication 01.10.2016
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