처리량이 증가된 반도체 웨이퍼의 3D 볼륨 검사 방법
NEUMANN JENS TIMO, KORB THOMAS, AVISHAI AMIR, KLOCHKOV DMITRY, BUXBAUM ALEX, FOCA EUGEN
Year of Publication 23.08.2024
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Year of Publication 23.08.2024
Patent
정확도가 증가된 반도체 웨이퍼의 3D 체적 검사
NEUMANN JENS TIMO, HUYNH CHUONG, KORB THOMAS, AVISHAI AMIR, KLOCHKOV DMITRY, BUXBAUM ALEX, FOCA EUGEN
Year of Publication 09.08.2024
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Year of Publication 09.08.2024
Patent
샘플 측정 방법 및 그 방법을 실시하는 현미경
NEUMANN JENS TIMO, AVISHAI AMIR, KORB THOMAS, KLOCHKOV DMITRY, FOCA EUGEN, LEE KEUMSIL
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
Patent
왜곡이 있는 샘플 이미지에서의 반도체 샘플의 결함 검출 방법
NEUMANN JENS TIMO, KORB THOMAS, HOFMANN ULRICH, MEYER SVEN, CHUST THOMAS C
Year of Publication 26.03.2024
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Year of Publication 26.03.2024
Patent
고종횡비 구조체의 세분화 또는 단면
NEUMANN JENS TIMO, PERSCH JOHANNES, KORB THOMAS, FREYTAG ALEXANDER, TOEPPE ENO, KLOCHKOV DMITRY, SRIKANTHA ABHILASH
Year of Publication 21.12.2023
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Year of Publication 21.12.2023
Patent
증가된 처리량을 갖는 반도체 피처의 측정 방법 및 장치
PERSCH JOHANNES, NEUMANN JENS TIMO, KORB THOMAS, AVISHAI AMIR, MALKI OLIVER, FREYTAG ALEXANDER, KLOCHKOV DMITRY, BUXBAUM ALEX, FOCA EUGEN
Year of Publication 19.07.2024
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Year of Publication 19.07.2024
Patent
제1 이미지 세트로부터 제2 이미지 세트로 3D 단층 촬영의 정렬 정보 전달
NEUMANN JENS TIMO, KORB THOMAS, AVISHAI AMIR, KLOCHKOV DMITRY, BUXBAUM ALEX, FOCA EUGEN
Year of Publication 31.05.2023
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Year of Publication 31.05.2023
Patent
웨이퍼의 검사 볼륨을 단면 이미징하는 방법
NEUMANN JENS TIMO, HUYNH CHUONG, KORB THOMAS, KLOCHKOV DMITRY, NIU BAOHUA, BUXBAUM ALEX, FOCA EUGEN
Year of Publication 21.11.2022
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Year of Publication 21.11.2022
Patent
다중 스캐닝 전자 현미경 검사법을 사용하는 웨이퍼 정렬
SARASWATULA JAGDISH CHANDRA, NEUMANN JENS TIMO, HANUMANTHA NAYAK RAGHAVENDRA, KORB THOMAS, HUETHWOHL PHILIPP
Year of Publication 18.05.2022
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Year of Publication 18.05.2022
Patent
개선된 3D 체적 이미지 재구성 정확도를 갖는 단면 이미징
NEUMANN JENS TIMO, KORB THOMAS, AVISHAI AMIR, KLOCHKOV DMITRY, SCHULMEYER INGO, BUXBAUM ALEX, FOCA EUGEN, LEE KEUMSIL
Year of Publication 17.06.2022
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Year of Publication 17.06.2022
Patent
입자 현미경을 사용하여 영상을 기록하는 방법
RIEDESEL CHRISTOF, WOJEK CHRISTIAN, NEUMANN JENS TIMO, ZEIDLER DIRK, KORB THOMAS, CORREA JOAQUIN, HUETHWOHL PHILIPP, HOGELE WOLFGANG
Year of Publication 11.06.2021
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Year of Publication 11.06.2021
Patent
Machine-learning based methodologies for 3d x-ray measurement, characterization and optimization for buried structures in advanced ic packages
Pahwa, Ramanpreet S, Soon Wee Ho, Ren, Qin, Chang, Richard, Oo, Zaw Min, Wang, Jie, Vempati Srinivasa Rao, Tin Lay Nwe, Yang, Yanjing, Jens Timo Neumann, Ramani Pichumani, Gregorich, Thomas
Published in arXiv.org (20.05.2021)
Published in arXiv.org (20.05.2021)
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