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LITHOGRAPHIC APPARATUS AND METHOD FOR DETECTING PRECISE CLAMPING OF PROCESSING OBJECT TO RAPIDLY DETERMINE PRECISE DISPOSITION OF PROCESSING OBJECT LIKE WAFER OR MASK ON SUPPORTING STRUCTURE

LITHOGRAPHIC APPARATUS AND METHOD FOR DETECTING PRECISE CLAMPING OF PROCESSING OBJECT TO RAPIDLY DETERMINE PRECISE DISPOSITION OF PROCESSING OBJECT LIKE WAFER OR MASK ON SUPPORTING STRUCTURE

by NEERHOF HENDRIK ANTONY JOHANNES
Year of Publication 19.08.2004

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Patent

Lithographic apparatus and method to detect correct clamping of an object

Lithographic apparatus and method to detect correct clamping of an object

by NEERHOF, HENDRIK ANTONY JOHANNES
Year of Publication 02.09.2009

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Patent

LITHOGRAPHIC APPARATUS AND METHOD TO DETECT CORRECT CLAMPING OF AN OBJECT

LITHOGRAPHIC APPARATUS AND METHOD TO DETECT CORRECT CLAMPING OF AN OBJECT

by NEERHOF, HENDRIK ANTONY JOHANNES
Year of Publication 28.09.2007

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Patent

Lithographic apparatus and method to detect correct clamping of an object

Lithographic apparatus and method to detect correct clamping of an object

by NEERHOF, HENDRIK ANTONY JOHANNES
Year of Publication 11.03.2007

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Patent

IMAGE-COMPENSATING ADDRESSABLE ELECTROSTATIC CHUCK SYSTEM

IMAGE-COMPENSATING ADDRESSABLE ELECTROSTATIC CHUCK SYSTEM

by LOOPSTRA ERIK ROELOF, HENDRIK ANTONY JOHANNES NEERHOF
Year of Publication 09.02.2012

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Patent

Image-Compensating Addressable Electrostatic Chuck System

Image-Compensating Addressable Electrostatic Chuck System

by LOOPSTRA ERIK ROELOF, NEERHOF HENDRIK ANTONY JOHANNES
Year of Publication 02.02.2012

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Patent

Lithographic apparatus and method to detect correct clamping of an object

Lithographic apparatus and method to detect correct clamping of an object

by NEERHOF HENDRIK ANTONY JOHANNES
Year of Publication 19.09.2006

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Patent

Lithographic apparatus and method to detect correct clamping of an object

Lithographic apparatus and method to detect correct clamping of an object

by Neerhof, Hendrik Antony Johannes
Year of Publication 19.09.2006

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Patent

Lithographic Apparatus and Device Manufacturing Method

Lithographic Apparatus and Device Manufacturing Method

by EURLINGS MARKUS FRANCISCUS ANTONIUS, NEERHOF HENDRIK ANTONY JOHANNES
Year of Publication 01.08.2013

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Patent

IMAGE-COMPENSATING ADDRESSABLE ELECTROSTATIC CHUCK SYSTEM

IMAGE-COMPENSATING ADDRESSABLE ELECTROSTATIC CHUCK SYSTEM

by LOOPSTRA, ERIK ROELOF, NEERHOF, HENDRIK ANTONY JOHANNES
Year of Publication 12.01.2011

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Patent

Lithographic apparatus and method to detect correct clamping of an object

Lithographic apparatus and method to detect correct clamping of an object

by NEERHOF HENDRIK ANTONY JOHANNES
Year of Publication 11.11.2004

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Patent

LITHOGRAPHY APPARATUS AND METHOD OF DETECTING ACCURATE FIXING OF OBJECT

LITHOGRAPHY APPARATUS AND METHOD OF DETECTING ACCURATE FIXING OF OBJECT

by NEERHOF HENDRIK ANTONY JOHANNES
Year of Publication 02.09.2004

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Patent

Lithographic apparatus and method to detect correct clamping of an object

Lithographic apparatus and method to detect correct clamping of an object

by NEERHOF, HENDRIK ANTONY JOHANNES
Year of Publication 18.08.2004

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by NEERHOF HENDRIK ANTONY JOHANNES, ZWAANS CORNELIS MARIA, VROLIJKS ERNST EDUART
Year of Publication 06.09.2011

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by Neerhof, Hendrik Antony Johannes, Zwaans, Cornelis Maria, Vrolijks, Ernst Eduart
Year of Publication 06.09.2011

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Patent

Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device

Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device

by LOOPSTRA ERIK ROELOF, SCACCABAROZZI LUIGI, NEERHOF HENDRIK ANTONY JOHANNES, BANINE VADIM YEVGENYEVICH, VAN DIJK ADRIANUS JOHANNES MARIA, STEINHOFF JENS ARNO, BRULS RICHARD JOSEPH, YAKUNIN ANDREI MIKHAILOVICH
Year of Publication 29.03.2016

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by NEERHOF HENDRIK ANTONY JOHANNES, HEERENS GERT-JAN
Year of Publication 10.10.2006

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by Neerhof, Hendrik Antony Johannes, Heerens, Gert-Jan
Year of Publication 10.10.2006

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Patent

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

by ZWAANS CORNELIS MARIA, VROLIJKS ERNST EDUART, HENDRIK ANTONY JOHANNES NEERHOF
Year of Publication 15.01.2009

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Patent

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

by NEERHOF HENDRIK ANTONY JOHANNES, ZWAANS CORNELIS MARIA, VROLIJKS ERNST EDUART
Year of Publication 18.12.2008

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Patent