Selective atomic layer deposition on flexible polymeric substrates employing a polyimide adhesive as a physical mask
Forouzmehr, Matin, Zambou, Serges, Lahtonen, Kimmo, Honkanen, Mari, Nazmul Anam, Rafi Md, Ruhanen, Aleksi, Rokaya, Chakra, Lupo, Donald, Berger, Paul R.
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.01.2021)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.01.2021)
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