Individual Atomic Imaging of Multiple Dopant Sites in As-Doped Si Using Spectro-Photoelectron Holography
Tsutsui, Kazuo, Matsushita, Tomohiro, Natori, Kotaro, Muro, Takayuki, Morikawa, Yoshitada, Hoshii, Takuya, Kakushima, Kuniyuki, Wakabayashi, Hitoshi, Hayashi, Kouichi, Matsui, Fumihiko, Kinoshita, Toyohiko
Published in Nano letters (13.12.2017)
Published in Nano letters (13.12.2017)
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Journal Article
Analyses of 3D atomic arrangements of impurity atoms doped in silicon by spectro-photoelectron holography technique
Tsutsui, Kazuo, Matsushita, Tomohiro, Muro, Takayuki, Morikawa, Yoshitada, Natori, Kotaro, Hoshii, Takuya, Kakushima, Kuniyuki, Wakabayashi, Hitoshi, Hayashi, Kouichi, Matsui, Fumihiko, Kinoshita, Toyohiko
Published in 2018 18th International Workshop on Junction Technology (IWJT) (01.03.2018)
Published in 2018 18th International Workshop on Junction Technology (IWJT) (01.03.2018)
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Conference Proceeding