A 100 nm CMOS technology with "sidewall-notched" 40 nm transistors and SiC-capped Cu/VLK interconnects for high performance microprocessor applications
Nakai, S., Takao, Y., Otsuka, S., Sugiyama, K., Ohta, H., Yamanoue, A., Iriyama, Y., Nanjyo, R., Sekino, S., Nagai, H., Naitoh, K., Nakamura, R., Sambonsugi, Y., Tagawa, Y., Horiguchi, N., Yamamoto, T., Kojima, M., Satoh, S., Sugatani, S., Sugii, T., Kase, M., Suzuki, K., Nakaishi, M., Miyajima, M., Ohba, T., Hanyu, I., Yanai, K.
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
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Conference Proceeding
0.65 V device design with high-performance and high-density 100 nm CMOS technology for low operation power application
Takao, Y., Nakai, S., Tagawa, Y., Otsuka, S., Sambonsugi, Y., Sugiyama, K., Oota, H., Iriyama, Y., Nanjyo, R., Nagai, H., Naitoh, K., Nakamura, R., Sekino, S., Yamanoue, A., Horiguchi, N., Yamamoto, T., Kojima, M., Satoh, S., Sugii, T., Kase, M., Suzuki, K., Nakaishi, M., Miyajima, M., Ohba, T., Hanyu, I., Sugatani, S.
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
Published in 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) (2002)
Get full text
Conference Proceeding