Thin film forming using laser and activated oxidising gas
MUTSUMI TSUDA, TAISUKE FURUKAWA, KENYU HARUTA, KOICHI ONO, KEISUKE NANBA
Year of Publication 23.10.1996
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Year of Publication 23.10.1996
Patent
Thin film forming apparatus using laser
OGAMA; TETSUO, ONO; KOICHI, WADA; YUKIHIKO, KISE; KOUJI, FURUKAWA; TAISUKE, NANBA; KEISUKE, KAWAHARA; TAKAAKI, YUKI; AKIMASA, MIKAMI; NOBORU, TANIMURA; JUNJI, SASAGAWA; TOMOHIRO, KURODA; KENICHI, YABE; HIDEKI, MATSUI; YASUJI, KURAMOTO; KAZUO, HORIKAWA; TSUYOSHI, FUJINO; NAOHIKO, SAITO; YOSHIO, SUZUKI; AKIHIRO, KUROKI; HIROSHI, KOJIMA; KAZUYOSHI, OISHI; TOSHIYUKI, MAKITA; TETSUO, TSUDA; MUTSUMI, FURUKAWA; AKIHIKO, HARUTA; KENYU, TAKAMI; TETSUYA, WAKATA; HITOSHI
Year of Publication 29.08.2000
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Year of Publication 29.08.2000
Patent
DE3844630
YASUNAGA, SEIJI, KAWAGOE, YASUYUKI, YAMANISHI, KENICHIRO, NANBA, KEISUKE, TANAKA, MASAAKI, YAGI, SHIGENORI, AMAGASAKI, HYOGO, JP, INOUE, SHINICHI, IMADA, KATSUHIRO
Year of Publication 22.11.1990
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Year of Publication 22.11.1990
Patent
DE3839903
YASUNAGA, SEIJI, KAWAGOE, YASUYUKI, YAMANISHI, KENICHIRO, NANBA, KEISUKE, TANAKA, MASAAKI, YAGI, SHIGENORI, AMAGASAKI, HYOGO, JP, INOUE, SHINICHI, IMADA, KATSUHIRO
Year of Publication 23.05.1990
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Year of Publication 23.05.1990
Patent
Thin Film forming apparatus using laser
KENICHI KURODA, YUKIHIKO WADA, AKIHIKO FURUKAWA, MUTSUMI TSUDA, NAOHIKO FUJINO, YASUJI MATSUI, KAZUO KURAMOTO, KEISUKE NANBA, KAZUYOSHI KOJIMA, TOMOHIRO SASAGAWA, AKIMASA YUKI, TAISUKE FURUKAWA, TETSUO OGAMA, HITOSHI WAKATA, NOBORU MIKAMI, TETSURO MAKITA, TSUYOSHI HORIKAWA, AKIHIRO SUZUKI, HIDEKI YABE, KOICHI ONO, YOSHIO SAITO, KENYU HARUTA, TOSHIYUKI OISHI, KOUJI KISE, JUNJI TANIMURA, TAKAAKI KAWAHARA, TETSUYA TAKAMI, HIROSHI KUROKI
Year of Publication 28.05.1997
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Year of Publication 28.05.1997
Patent
Thin film forming apparatus using laser
KENICHI KURODA, YUKIHIKO WADA, AKIHIKO FURUKAWA, MUTSUMI TSUDA, NAOHIKO FUJINO, YASUJI MATSUI, KAZUO KURAMOTO, KEISUKE NANBA, KAZUYOSHI KOJIMA, TOMOHIRO SASAGAWA, AKIMASA YUKI, TAISUKE FURUKAWA, TETSUO OGAMA, HITOSHI WAKATA, NOBORU MIKAMI, TETSURO MAKITA, TSUYOSHI HORIKAWA, AKIHIRO SUZUKI, HIDEKI YABE, KOICHI ONO, YOSHIO SAITO, KENYU HARUTA, TOSHIYUKI OISHI, KOUJI KISE, JUNJI TANIMURA, TAKAAKI KAWAHARA, TETSUYA TAKAMI, HIROSHI KUROKI
Year of Publication 01.06.1994
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Year of Publication 01.06.1994
Patent
Vorrichtung zur Ausbildung einer Dünnschicht unter Verwendung eines Lasers
MIKAMI, NOBORU, AMAGASAKI, HYOGO, HORIKAWA, TSUYOSHI, AMAGASAKI, HYOGO, KAWAHARA, TAKAAKI, AMAGASAKI, HYOGO, NANBA, KEISUKE, AMAGASAKI, HYOGO, SUZUKI, AKIHIRO, AMAGASAKI, HYOGO, OISHI, TOSHIYUKI, AMAGASAKI, HYOGO, KUROKI, HIROSHI, AMAGASAKI, HYOGO, TANIMURA, JUNJI, AMAGASAKI, HYOGO, YUKI, AKIMASA, AMAGASAKI, HYOGO, FURUKAWA, AKIHIKO, AMAGASAKI, HYOGO, ONO, KOICHI, AMAGASAKI, HYOGO, FUJINO, NAOHIKO, AMAGASAKI, HYOGO, YABE, HIDEKI, AMAGASAKI, HYOGO, TAKAMI, TETSUYA, AMAGASAKI, HYOGO, MATSUI, YASUJI, AMAGASAKI, HYOGO, WAKATA, HITOSHI, AMAGASAKI, HYOGO, KURODA, KENICHI, AMAGASAKI, HYOGO, SAITO, YOSHIO, AMAGASAKI, HYOGO, MAKITA, TETSURO, AMAGASAKI, HYOGO, OGAMA, TETSUO, AMAGASAKI, HYOGO, SASAGAWA, TOMOHIRO, AMAGASAKI, HYOGO, WADA, YUKIHIKO, AMAGASAKI, HYOGO, FURUKAWA, TAISUKE, AMAGASAKI, HYOGO, KISE, KOUJI, AMAGASAKI, HYOGO, KOJIMA, KAZUYOSHI, AMAGASAKI, HYOGO, HARUTA, KENYU, AMAGASAKI, HYOGO, TSUDA, MUTSUMI, AMAGASAKI, HYOGO, KURAMOTO, KAZUO, AMAGASAKI, HYOGO
Year of Publication 01.06.1994
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Year of Publication 01.06.1994
Patent
Vorrichtung zur Herstellung einer gleichförmigen Dünnschicht auf einer großen Substratfläche unter Verwendung eines Lasers
WAKATA, HITOSHI, AMAGASAKI, HYOGO, JP, HARUTA, KENYU, AMAGASAKI, HYOGO, JP, OISHI, TOSHIYUKI, AMAGASAKI, HYOGO, JP, FUJINO, NAOHIKO, AMAGASAKI, HYOGO, JP, FURUKAWA, AKIHIKO, AMAGASAKI, HYOGO, JP, KOJIMA, KAZUYOSHI, AMAGASAKI, HYOGO, JP, ONO, KOICHI, AMAGASAKI, HYOGO, JP, TAKAMI, TETSUYA, AMAGASAKI, HYOGO, JP, MIKAMI, NOBORU, AMAGASAKI, HYOGO, JP, TSUDA, MUTSUMI, AMAGASAKI, HYOGO, JP, MATSUI, YASUJI, AMAGASAKI, HYOGO, JP, OGAMA, TETSUO, AMAGASAKI, HYOGO, JP, YUKI, AKIMASA, AMAGASAKI, HYOGO, JP, YABE, HIDEKI, AMAGASAKI, HYOGO, JP, WADA, YUKIHIKO, AMAGASAKI, HYOGO, JP, KURAMOTO, KAZUO, AMAGASAKI, HYOGO, JP, KURODA, KENICHI, AMAGASAKI, HYOGO, JP, FURUKAWA, TAISUKE, AMAGASAKI, HYOGO, JP, KUROKI, HIROSHI, AMAGASAKI, HYOGO, JP, SAITO, YOSHIO, AMAGASAKI, HYOGO, JP, SUZUKI, AKIHIRO, AMAGASAKI, HYOGO, JP, TANIMURA, JUNJI, AMAGASAKI, HYOGO, JP, MAKITA, TETSURO, AMAGASAKI, HYOGO, JP, HORIKAWA, TSUYOSHI, AMAGASAKI, HYOGO, JP, NANBA, KEISUKE, AMAGASAKI, HYOGO, JP, KISE, KOUJI, AMAGASAKI, HYOGO, JP, KAWAHARA, TAKAAKI, AMAGASAKI, HYOGO, JP, SASAGAWA, TOMOHIRO, AMAGASAKI, HYOGO, JP
Year of Publication 20.07.1995
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Year of Publication 20.07.1995
Patent