High-Speed Wafer Temperature Control Approach of Step Chiller for Semiconductor Manufacturing Equipment
Yun, Hyeonjun, Kwon, Hyeseon, Yeh, Sangsu, Lee, Minsu, Kim, Jonghwa, Kim, Yunha, Cha, Seungwoo, Kang, Mingu, Nam, Jooyeop
Published in IECON 2023- 49th Annual Conference of the IEEE Industrial Electronics Society (16.10.2023)
Published in IECON 2023- 49th Annual Conference of the IEEE Industrial Electronics Society (16.10.2023)
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