Durability of antisticking layer against heat in nanoimprinting evaluated using scanning probe microscopy
Okada, Makoto, Iwasa, Masayuki, Nakamatsu, Ken-ichiro, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
Get full text
Journal Article
Conference Proceeding
Nanoimprint and Lift-Off Process Using Poly(vinyl alcohol)
Nakamatsu, Ken-ichiro, Tone, Katsuhiko, Matsui, Shinji
Published in Japanese Journal of Applied Physics (01.11.2005)
Published in Japanese Journal of Applied Physics (01.11.2005)
Get full text
Journal Article
Fabrication of Organic Spin-on-Glass Microring Resonator with a Narrow Gap between a Microring Resonator and a Waveguide Using Nanoimprint Lithography
Okamoto, Hiroyuki, Yamaguchi, Kenzo, Nakamatsu, Ken-ichiro, Sogabe, Hidenori, Matsui, Shinji, Haraguchi, Masanobu, Okamoto, Toshihiro, Fukui, Masuo
Published in Japanese Journal of Applied Physics (01.07.2010)
Published in Japanese Journal of Applied Physics (01.07.2010)
Get full text
Journal Article
Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition
Igaki, Jun-ya, Kometani, Reo, Nakamatsu, Ken-ichiro, Kanda, Kazuhiro, Haruyama, Yuichi, Ochiai, Yukinori, Fujita, Jun-ichi, Kaito, Takashi, Matsui, Shinji
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
Get full text
Journal Article
Conference Proceeding
UV-Curable Resins Appropriate for UV Nanoimprint
Iyoshi, Shuso, Miyake, Hiroto, Nakamatsu, Ken-ichiro, Matsui, Shinji
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Get full text
Journal Article
Fabrication of Fine Electron Biprism Filament by Free-Space-Nanowiring Technique of Focused-Ion-Beam + Chemical Vapor Deposition for Accurate Off-Axis Electron Holography
Nakamatsu, Ken-ichiro, Yamamoto, Kazuo, Hirayama, Tsukasa, Matsui, Shinji
Published in Applied physics express (01.11.2008)
Published in Applied physics express (01.11.2008)
Get full text
Journal Article
Characterization of Nanoimprint Resin and Antisticking Layer by Scanning Probe Microscopy
Okada, Makoto, Kang, Yuji, Nakamatsu, Ken-ichiro, Iwasa, Masayuki, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji
Published in Journal of Photopolymer Science and Technology (01.01.2009)
Published in Journal of Photopolymer Science and Technology (01.01.2009)
Get full text
Journal Article
Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
Nakamatsu, Ken-ichiro, Watanabe, Keiichiro, Tone, Katsuhiko, Katase, Tetsuya, Hattori, Wataru, Ochiai, Yukinori, Matsuo, Takahiro, Sasago, Masaru, Namatsu, Hideo, Komuro, Masanori, Matsui, Shinji
Published in Japanese Journal of Applied Physics (01.06.2004)
Published in Japanese Journal of Applied Physics (01.06.2004)
Get full text
Journal Article
Effect of UV Irradiation on Microlens Arrays Fabricated by Room Temperature Nanoimprinting Using Organic Spin-on-Glass
Nakamatsu, Ken-ichiro, Okada, Makoto, Minari, Chiaki, Takeuchi, Yoshiyuki, Taneichi, Noriaki, Ohtaka, Shoji, Matsui, Shinji
Published in Applied physics express (01.06.2008)
Published in Applied physics express (01.06.2008)
Get full text
Journal Article
Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
Okada, Makoto, Iwasa, Masayuki, Nakamatsu, Ken-ichiro, Yamada, Noriko, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji
Published in Japanese Journal of Applied Physics (01.09.2008)
Published in Japanese Journal of Applied Physics (01.09.2008)
Get full text
Journal Article
Evaluation of Fluorinated Diamond Like Carbon as Antisticking Layer by Scanning Probe Microscopy
Okada, Makoto, Iwasa, Masayuki, Nakamatsu, Ken-ichiro, Yamada, Noriko, Kanda, Kazuhiro, Haruyama, Yuichi, Matsui, Shinji
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Published in Journal of Photopolymer Science and Technology (01.01.2008)
Get full text
Journal Article