Vacancy-Boron Complexes in Plasma Immersion Ion-Implanted Si Probed by a Monoenergetic Positron Beam
Uedono, Akira, Tsutsui, Kazuo, Ishibashi, Shoji, Watanabe, Hiromichi, Kubota, Shoji, Nakagawa, Yasumasa, Mizuno, Bunji, Hattori, Takeo, Iwai, Hiroshi
Published in Japanese Journal of Applied Physics (01.05.2010)
Published in Japanese Journal of Applied Physics (01.05.2010)
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Journal Article
Vacancy-type defects in ultra-shallow junctions fabricated using plasma doping studied by positron annihilation
Uedono, Akira, Tsutsui, Kazuo, Ishibashi, Shoji, Watanabe, Hiromichi, Kubota, Shoji, Tenjinbayashi, Kazuki, Nakagawa, Yasumasa, Mizuno, Bunji, Hattori, Takeo, Iwai, Hiroshi
Published in 2010 International Workshop on Junction Technology Extended Abstracts (01.05.2010)
Published in 2010 International Workshop on Junction Technology Extended Abstracts (01.05.2010)
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Conference Proceeding
Depth profiling of chemical bonding states of impurity atoms and their correlation with electrical activity in Si shallow junctions
Tsutsui, Kazuo, Hoshino, Norifumi, Nakagawa, Yasumasa, Tanaka, Masaoki, Nohira, Hiroshi, Kakushima, Kuniyuki, Ahemt, Parhat, Sasaki, Yuichiro, Mizuno, Bunji, Hattori, Takeo, Iwai, Hiroshi
Published in 2010 International Workshop on Junction Technology Extended Abstracts (01.05.2010)
Published in 2010 International Workshop on Junction Technology Extended Abstracts (01.05.2010)
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Conference Proceeding
Profiling of carrier properties for shallow junctions using a new sub-nanometer step-by-step etching technique
Tsutsui, K., Watanabe, M., Nakagawa, Y., Sakai, K., Kai, T., Cheng-Guo Jin, Sasaki, Y., Kakushima, K., Ahmet, P., Mizuno, B., Hattori, T., Iwai, H.
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
Published in Extended Abstracts - 2008 8th International Workshop on Junction Technology (IWJT '08) (01.05.2008)
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Conference Proceeding
TAKING-IN AND -OUT METHOD AND DEVICE FOR AUTOMATED STORAGE AND RETRIEVAL WAREHOUSE
SHINGO DAIZABURO, MATSUBARA TSUNEHIKO, NOHARA TSUTOMU, NAKAGAWA YASUMASA
Year of Publication 08.03.2002
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Year of Publication 08.03.2002
Patent