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Year of Publication 17.05.2024
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Year of Publication 07.06.2023
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SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
NAITO DONN K, BARTOSH KYLE, CLEARY JOHN M, CHEON SEBUM, GREGG JOHN N, HODGES JORDAN, BATTLE SCOTT L, HENDRIX BRYAN C
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Year of Publication 03.11.2020
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SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY
NAITO DONN, ARNO JOSE I, CLEARY JOHN M, XU CHONGYING, BATTLE SCOTT, WODJENSKI MICHAEL J, GREGG JOHN, HENDRIX BRYAN C
Year of Publication 27.09.2019
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Year of Publication 27.09.2019
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NAITO DONN, LAXMAN RAVI K, BATTLE SCOTT, FUIERER MARIANNE, GREGG JOHN, BANTON JEFFREY I
Year of Publication 09.06.2016
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Year of Publication 09.06.2016
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METHOD AND APPARATUS FOR HELPING PROMOTION OF CONTACT BETWEEN GAS AND VAPORIZED MATERIAL
NAITO DONN, LAXMAN RAVI K, BATTLE SCOTT, GREGG JOHN, BANTON JEFFREY I
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Year of Publication 07.01.2016
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NAITO DONN, LAXMAN RAVI K, BATTLE SCOTT, FUIERER MARIANNE, GREGG JOHN, BANTON JEFFREY I
Year of Publication 03.09.2015
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Year of Publication 03.09.2015
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SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY
NAITO DONN, ARNO JOSE I, CLEARY JOHN M, XU CHONGYING, BATTLE SCOTT, WODJENSKI MICHAEL J, GREGG JOHN, HENDRIX BRYAN C
Year of Publication 01.07.2016
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Year of Publication 01.07.2016
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VAPOR DELIVERY SYSTEM, VAPORIZER, VAPORIZER UNIT AND METHOD FOR DELIVERING A VAPORIZED SOURCE MATERIAL
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Year of Publication 05.04.2012
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Year of Publication 05.04.2012
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SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY
NAITO DONN, ARNO JOSE I, CLEARY JOHN M, XU CHONGYING, BATTLE SCOTT, WODJENSKI MICHAEL J, GREGG JOHN, HENDRIX BRYAN C
Year of Publication 10.07.2013
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Year of Publication 10.07.2013
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