by Hattori, Shinobu, Fukuda, Toshio, Maruhashi, Toshihiro, Matsuura, Hideo, Nagamori, Shigenobu
Published in Transactions of the Japan Society of Mechanical Engineers Series C (1993)

by Hattori, Shinobu, Fukuda, Toshio, Maruhashi, Toshihiro, Nagamori, Shigenobu
Published in Transactions of the Japan Society of Mechanical Engineers Series C (25.07.1993)

by HATTORI, Shinobu, FUKUDA, Toshio, KATSURAYAMA, Yuji, MATSUURA, Hideo, NAGAMORI, Shigenobu, HIRAMATSU, Tsutomu
Published in Transactions of the Japan Society of Mechanical Engineers Series C (1992)

by HATTORI, Shinobu, FUKUDA, Toshio, KISHI, Ryoichi, ICHIJO, Hisao, KATAYAMA, Hajime, MATSUURA, Hideo, WATARAI, Tatsuki, NAGAMORI, Shigenobu, HIRAMATSU, Tsutomu
Published in Transactions of the Japan Society of Mechanical Engineers Series C (1992)

by FUKUDA; TOSHIO, HATTORI; SHINOBU, NAGAMORI; SHIGENOBU
Year of Publication 09.08.1994

by FUKUDA; TOSHIO, HATTORI; SHINOBU, NAGAMORI; SHIGENOBU
Year of Publication 22.02.1994

by HATTORI SHINOBU, FUKUDA TOSHIO, NAGAMORI SHIGENOBU
Year of Publication 23.04.1993

by HATTORI SHINOBU, FUKUDA TOSHIO, NAGAMORI SHIGENOBU
Year of Publication 06.04.1993

by MIYAKE NOBUTADA, HATTORI SHINOBU, FUKUDA TOSHIO, NAGAMORI SHIGENOBU
Year of Publication 10.06.1992

by Hattori, S., Fukuda, T., Kishi, R., Ichijo, H., Katsurayama, Y., Katayama, H., Matsuura, H., Watarai, T., Nagamori, S., Hiramatsu, T.
Published in [1992] Proceedings IEEE Micro Electro Mechanical Systems (1992)