Advances in Immersion Related Defectivity on XT:1250i at IMEC
Meanhoudt, M., Kocsis, M., Stepanenko, N., O'Brien, S., Heuvel, D. Van Den, Vangoidsenhoven, D., Gronheid, R., Benndorf, M., Nafus, K., Fyen, W., Kim, H-W, Kishimura, S., Ronse, K.
Published in Journal of Photopolymer Science and Technology (2006)
Published in Journal of Photopolymer Science and Technology (2006)
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Journal Article
Partial Wetting of Aqueous Solutions on High Aspect Ratio Nanopillars with Hydrophilic Surface Finish
Vereecke, G., Xu, XiuMei, Tsai, W. K., Yang, Hui, Armini, S., Delande, T., Doumen, G., Kentie, F., Shi, Xiaoping, Simms, I., Nafus, K., Holsteyns, F., Struyf, H., De Gendt, S.
Published in ECS journal of solid state science and technology (01.01.2014)
Published in ECS journal of solid state science and technology (01.01.2014)
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Journal Article
(Invited) Wetting Behavior of Aqueous Solutions on High Aspect Ratio Nanopillars with Hydrophilic Surface Finish
Vereecke, Guy, Xu, XiuMei, Tsai, Wei-Kang, Yang, Hui, Armini, Silvia, Delande, Tinne, Doumen, Geert, Kentie, Frank, Shi, Xiaoping, Simms, Ihsan, Nafus, Kathleen, Holsteyns, Frank, Struyf, Herbert, De Gendt, Stefan
Published in ECS transactions (31.08.2013)
Published in ECS transactions (31.08.2013)
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Journal Article
Advances in Immersion Related Defectivity on XT
Meanhoudt, M, Kocsis, M, Stepanenko, N, O'Brien, S, Van Den Heuvel, D, Vangoidsenhoven, D, Gronheid, R, Benndorf, M, Nafus, K, Fyen, W, Kim, H-W, Kishimura, S, Ronse, K
Published in Journal of photopolymer science and technology (01.09.2006)
Get full text
Published in Journal of photopolymer science and technology (01.09.2006)
Journal Article