Method of forming fine patterns in an anti-reflection layer for use as a patterning hard mask
Park Min Ju, Na Haisub, Yun Hyojin, Kim Kyoungseon, Kim Hyunwoo, Han So-Ra, Kim Su Min, Park Su-min
Year of Publication 14.02.2017
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Year of Publication 14.02.2017
Patent
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
Park Min Ju, Na Haisub, Yun Hyojin, Kim Kyoungseon, Kim Hyunwoo, Han So-Ra, Kim Su Min, Park Su Min
Year of Publication 06.10.2016
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Year of Publication 06.10.2016
Patent
Preparation of Sol-Gel Derived Nanocrystalline TiO2 Particles in Titania-Silica Composite for Photocatalytic Applications
Na, Haisub, Kwon, Chulhan, Choi, Woosuk, Park, Soonjea, Yoon, Kihyun, Baik, Hongkoo, Han, Yangkyoo
Published in Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals (01.01.2001)
Published in Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals (01.01.2001)
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Journal Article
Conference Proceeding