A study on the real-time decomposition monitoring of a metal organic precursor for metal organic chemical vapor deposition processes
Yun, Ju-Young, Heo, Soo-Won, Kang, Sang-Woo, Na, Jeong-Gil, Park, Young-Jae, Shin, Yong-Hyeon, Lee, Ji-Hoon, Kim, Tae-Sung, Moon, Doo-Kyung
Published in Measurement science & technology (01.02.2009)
Published in Measurement science & technology (01.02.2009)
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Journal Article
APPARATUS AND METHOD FOR MEASURING PARTICLES
CHOI, JEONG SUK, CHOI, JAE BOONG, KIM, TAE SUNG, YOON, JIN WOOK, KIM, YOUNG JIN, KWON, YONG TAEK, NA, JEONG GIL
Year of Publication 31.08.2007
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Year of Publication 31.08.2007
Patent