Inductively coupled HDP-CVD reactor
REDEKER, FRED C, NOWAK, FRED ROMUALD, MAYDAN, DAN, ROSSMAN, KENT, SMYTH, KENNETH, FARHAD, MOGHADAM, LUE, BRIAN, WANG, YAXIM, SINHA, ASHOK, STEGER, ROBERT, WONG, MANUS, HANAWA, HIROJI, KRISHHANARAJ, PADMANABHAM, MURUGESH, LAXMAN, NIAZI, KAVEH, LI, SHIJIAN, ISHIKAWA, TETSUYA, STARYUIK, PAVEL
Year of Publication 18.02.2004
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Year of Publication 18.02.2004
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INDUCTIVELY COUPLED HDP-CVD REACTOR
NOWAK, FRED ROMUALD, MAYDAN, DAN, ROSSMAN, KENT, SMYTH, KENNETH, FARHAD, MOGHADAM, LUE, BRIAN, SREGER, ROBERT, WANG, YAXIM, SINHA, ASHOK, STAEYUIK, PAVEL, WONG, MANUS, HANAWA, HIROJI, KRISHHANARAJ, PADMANABHAM, MURUGESH, LAXMAN, NIAZI, KAVEH, LI, SHIJIAN, REDEKER FRED C, ISHIKAWA, TETSUYA
Year of Publication 01.12.2000
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Year of Publication 01.12.2000
Patent
Inductively coupled HDP-CVD reactor
REDEKER, FRED C, NOWAK, FRED ROMUALD, MAYDAN, DAN, ROSSMAN, KENT, SMYTH, KENNETH, FARHAD, MOGHADAM, LUE, BRIAN, WANG, YAXIM, SINHA, ASHOK, STEGER, ROBERT, WONG, MANUS, HANAWA, HIROJI, KRISHHANARAJ, PADMANABHAM, MURUGESH, LAXMAN, NIAZI, KAVEH, LI, SHIJIAN, ISHIKAWA, TETSUYA, STARYUIK, PAVEL
Year of Publication 27.05.1998
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Year of Publication 27.05.1998
Patent
INDUCTIVELY COUPLED HDP-CVD REACTOR
STARYUIK PAVEL, MAYDAN DAN, ISHIKAWA TETSUYA, WANG YAXIM, KRISHHANARAJ PADMANABHAM, SINHA ASHOK, NIAZI KAVEH, WONG MANUS, LI SHIJIAN, SMYTH KENNETH, BRIAN RYU, STEGER ROBERT, FARHAD MOGHADAM, MURUGESH LAXMAN, ROSSMAN KENT, HANAWA HIROJI, REDEKER FRED C, NOWAK FRED ROMUALD
Year of Publication 06.05.1998
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Year of Publication 06.05.1998
Patent
Inductively coupled HDP-CVD reactor
REDEKER, FRED C, NOWAK, FRED ROMUALD, MAYDAN, DAN, ROSSMAN, KENT, SMYTH, KENNETH, FARHAD, MOGHADAM, LUE, BRIAN, WANG, YAXIM, SINHA, ASHOK, STEGER, ROBERT, WONG, MANUS, HANAWA, HIROJI, KRISHHANARAJ, PADMANABHAM, MURUGESH, LAXMAN, NIAZI, KAVEH, LI, SHIJIAN, ISHIKAWA, TETSUYA, STARYUIK, PAVEL
Year of Publication 21.01.1998
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Year of Publication 21.01.1998
Patent
Induktiv gekoppelter HDP-CVD-Reaktor
REDEKER, FRED C, NOWAK, FRED ROMUALD, MAYDAN, DAN, ROSSMAN, KENT, SMYTH, KENNETH, FARHAD, MOGHADAM, LUE, BRIAN, WANG, YAXIM, SINHA, ASHOK, STEGER, ROBERT, WONG, MANUS, HANAWA, HIROJI, KRISHHANARAJ, PADMANABHAM, MURUGESH, LAXMAN, NIAZI, KAVEH, LI, SHIJIAN, ISHIKAWA, TETSUYA, STARYUIK, PAVEL
Year of Publication 14.10.2004
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Year of Publication 14.10.2004
Patent