Search Results - "NOWAK ROMOULD" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Method and system for coating the inside of a processing chamber

Method and system for coating the inside of a processing chamber

by TURGUT, SAHIN, ROSSMAN, KENT, M'SAAD, HI, NOWAK, ROMOULD
Year of Publication 02.07.2003

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Patent

Method and system for coating the inside of a processing chamber

Method and system for coating the inside of a processing chamber

by TURGUT, SAHIN, ROSSMAN, KENT, M'SAAD, HI, NOWAK, ROMOULD
Year of Publication 16.12.1998

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Patent

REDUCTION OF ION MIGRATION AND METAL CONTAMINATION IN HDP-CVD CHAMBER USING CHAMBER SEASONING FILM DEPOSITION

REDUCTION OF ION MIGRATION AND METAL CONTAMINATION IN HDP-CVD CHAMBER USING CHAMBER SEASONING FILM DEPOSITION

by KENT ROSSMANN, TURGUT SAHIN, M SAAD HI, NOWAK ROMOULD
Year of Publication 22.01.1999

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Patent

Verfahren und Anlage zur Innenbeschichtung einer Behandlungskammer

Verfahren und Anlage zur Innenbeschichtung einer Behandlungskammer

by TURGUT, SAHIN, ROSSMAN, KENT, M'SAAD, HI, NOWAK, ROMOULD
Year of Publication 24.12.2003

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Patent