Design and Fabrication Technology of Low Profile Tactile Sensor with Digital Interface for Whole Body Robot Skin
Makihata, Mitsutoshi, Muroyama, Masanori, Tanaka, Shuji, Nakayama, Takahiro, Nonomura, Yutaka, Esashi, Masayoshi
Published in Sensors (Basel, Switzerland) (21.07.2018)
Published in Sensors (Basel, Switzerland) (21.07.2018)
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Journal Article
A Tactile Sensor Network System Using a Multiple Sensor Platform with a Dedicated CMOS-LSI for Robot Applications
Shao, Chenzhong, Tanaka, Shuji, Nakayama, Takahiro, Hata, Yoshiyuki, Bartley, Travis, Nonomura, Yutaka, Muroyama, Masanori
Published in Sensors (Basel, Switzerland) (28.08.2017)
Published in Sensors (Basel, Switzerland) (28.08.2017)
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Journal Article
Improved anchor design for flat MEMS structure by suppressing deformation due to buried-oxide stress on silicon-on-insulator wafer
Fujiyoshi, Motohiro, Ozaki, Takashi, Omura, Yoshiteru, Funabashi, Hirofumi, Akashi, Teruhisa, Nonomura, Yutaka
Published in Journal of micromechanics and microengineering (01.04.2021)
Published in Journal of micromechanics and microengineering (01.04.2021)
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Journal Article
Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias
Hata, Yoshiyuki, Suzuki, Yukio, Muroyama, Masanori, Nakayama, Takahiro, Nonomura, Yutaka, Chand, Rakesh, Hirano, Hideki, Omura, Yoshiteru, Fujiyoshi, Motohiro, Tanaka, Shuji
Published in Sensors and actuators. A. Physical. (15.04.2018)
Published in Sensors and actuators. A. Physical. (15.04.2018)
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Journal Article
Quad-seesaw-electrode type 3-axis tactile sensor with low nonlinearities and low cross-axis sensitivities
Hata, Yoshiyuki, Nonomura, Yutaka, Omura, Yoshiteru, Nakayama, Takahiro, Fujiyoshi, Motohiro, Funabashi, Hirofumi, Akashi, Teruhisa, Muroyama, Masanori, Tanaka, Shuji
Published in Sensors and actuators. A. Physical. (15.10.2017)
Published in Sensors and actuators. A. Physical. (15.10.2017)
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Journal Article
Stress Isolation Suspension for Silicon-on-Insulator 3-Axis Accelerometer Designed by Topology Optimization Method
Fujiyoshi, Motohiro, Kawamoto, Atsushi, Hashimoto, Shoji, Omura, Yoshiteru, Funabashi, Hirofumi, Ohira, Yoshie, Hata, Yoshiyuki, Ozaki, Takashi, Akashi, Teruhisa, Nonomura, Yutaka, Nakayama, Takahiro, Yamada, Hitoshi
Published in IEEE sensors journal (01.03.2022)
Published in IEEE sensors journal (01.03.2022)
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Journal Article
3-Axis fully-integrated surface-mountable differential capacitive tactile sensor by CMOS flip-bonding
Asano, Sho, Muroyama, Masanori, Bartley, Travis, Nakayama, Takahiro, Yamaguchi, Ui, Yamada, Hitoshi, Hata, Yoshiyuki, Nonomura, Yutaka, Tanaka, Shuji
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
Published in 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2016)
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Conference Proceeding
Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line
Asano, Sho, Muroyama, Masanori, Bartley, Travis, Kojima, Takahiro, Nakayama, Takahiro, Yamaguchi, Ui, Yamada, Hitoshi, Nonomura, Yutaka, Hata, Yoshiyuki, Funabashi, Hirofumi, Tanaka, Shuji
Published in Sensors and actuators. A. Physical. (01.04.2016)
Published in Sensors and actuators. A. Physical. (01.04.2016)
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Journal Article
Heat Flow Measurement by A Force and Thermal Sensor Stick for Robots with A Nerve-Net LSI Chip
Hayato Tsuchiya, Keito Oshima, Yusuke Suganuma, Masanori Muroyama, Yutaka Nonomura
Published in Proceedings (01.12.2018)
Published in Proceedings (01.12.2018)
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Journal Article
Delay window blind oversampling clock and data recovery algorithm with wide tracking range
Bartley, Travis, Tanaka, Shuji, Nonomura, Yutaka, Nakayama, Takahiro, Muroyama, Masanori
Published in 2015 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2015)
Published in 2015 IEEE International Symposium on Circuits and Systems (ISCAS) (01.05.2015)
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Conference Proceeding
Cu Thin Film Polyimide Heater for Nerve-Net Tactile Sensor
Yusuke Suganuma, Minoru Sasaki, Takahiro Nakayama, Masanori Muroyama, Yutaka Nonomura
Published in Proceedings (01.08.2017)
Published in Proceedings (01.08.2017)
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Journal Article
SEMICONDUCTOR DEVICE
FUJIYOSHI MOTOHIRO, HATA YOSHIYUKI, TANAKA SHUJI, NONOMURA YUTAKA, MUROYAMA MASANORI, NAKAYAMA TAKAHIRO, SUZUKI YUKIO
Year of Publication 31.08.2017
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Year of Publication 31.08.2017
Patent
SENSOR DEVICE
FUJIYOSHI MOTOHIRO, HATA YOSHIYUKI, ESASHI MASAKI, TANAKA SHUJI, NONOMURA YUTAKA, BITO KOJI, MUROYAMA MASANORI, NAKAYAMA TAKAHIRO
Year of Publication 29.06.2017
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Year of Publication 29.06.2017
Patent
OPTICAL DEFLECTION DEVICE, LIGHT IRRADIATION DEVICE, AND DISTANCE MEASUREMENT DEVICE
AOYANAGI ISAO, NONOMURA YUTAKA, KITAKADO YOSHIMI, AKASHI TERUHISA, MURATA KANAE, ITO KUNIHIKO
Year of Publication 20.10.2016
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Year of Publication 20.10.2016
Patent
MEMS DEVICE
TANAKA HIROYA, IIZUKA HIDEO, AOYANAGI ISAO, NONOMURA YUTAKA, AKASHI TERUHISA, MURATA KANAE
Year of Publication 10.03.2016
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Year of Publication 10.03.2016
Patent
FORCE SENSOR TESTING DEVICE
HATA YOSHIYUKI, OMURA YOSHITERU, NONOMURA YUTAKA, MATSUSHIMA SATORU, YAMAGUCHI TAKATADA, YAMADA HITOSHI, FUNAHASHI HIROFUMI, NAKAYAMA TAKAHIRO
Year of Publication 10.12.2015
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Year of Publication 10.12.2015
Patent