Search Results - "NOJIRI; KAZUO" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Predicting synergy in atomic layer etching

Predicting synergy in atomic layer etching

by Kanarik, Keren J., Tan, Samantha, Yang, Wenbing, Kim, Taeseung, Lill, Thorsten, Kabansky, Alexander, Hudson, Eric A., Ohba, Tomihito, Nojiri, Kazuo, Yu, Jengyi, Wise, Rich, Berry, Ivan L., Pan, Yang, Marks, Jeffrey, Gottscho, Richard A.
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.09.2017)

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Journal Article

Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach

Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach

by Ohba, Tomihito, Yang, Wenbing, Tan, Samantha, Kanarik, Keren J., Nojiri, Kazuo
Published in Japanese Journal of Applied Physics (01.06.2017)

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Journal Article

Guest Editorial Special Section on the Second Electron Devices Technology and Manufacturing (EDTM) Conference 2018

Guest Editorial Special Section on the Second Electron Devices Technology and Manufacturing (EDTM) Conference 2018

by Ishimaru, Kazunari, Horiguchi, Naoto, Nojiri, Kazuo, Zhang, Paul Lining, Berger, Paul R.
Published in IEEE journal of the Electron Devices Society (2018)

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Journal Article

GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

by KANARIK KEREN JACOBS, YANG WENBING, TAN SAMANTHA, OHBA TOMIHITO, MARKS JEFFREY, NOJIRI KAZUO
Year of Publication 01.04.2024

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Patent

GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

by KANARIK KEREN JACOBS, YANG WENBING, TAN SAMANTHA, OHBA TOMIHITO, MARKS JEFFREY, NOJIRI KAZUO
Year of Publication 19.05.2022

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Patent

Plasma-etch-induced damage and its reduction in ultralarge-scale integration

Plasma-etch-induced damage and its reduction in ultralarge-scale integration

by NOJIRI, Kazuo, MIZUTANI, Tatsumi
Published in Oyo Buturi (10.11.1995)

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Journal Article

GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

by KANARIK KEREN JACOBS, YANG WENBING, TAN SAMANTHA, OHBA TOMIHITO, MARKS JEFFREY, NOJIRI KAZUO
Year of Publication 14.12.2016

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Patent

プラズマエッチングによる超LSIデバイスへのダメージとその抑制

プラズマエッチングによる超LSIデバイスへのダメージとその抑制

by 野尻, 一男, 水谷, 巽
Published in 応用物理 (1995)

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Journal Article

Studies on the Tooth Surface Strength of Spur Gears : Effects of Lubricating Oils on Tempered Gears and Case Hardened Gears

Studies on the Tooth Surface Strength of Spur Gears : Effects of Lubricating Oils on Tempered Gears and Case Hardened Gears

by HAIZUKA, Shoji, NARUSE, Chotaro, NEMOTO, Ryozo, NOJIRI, Kazuo
Published in Transactions of the Japan Society of Mechanical Engineers Series C (1987)

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Journal Article

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacturing the same

by OSHIMA TAKAFUMI, YUNOGAMI TAKASHI, FUKADA SHINICHI, HOTTA SHOJI, AOKI HIDEO, KOBAYASHI NOBUYOSHI, NOJIRI KAZUO
Year of Publication 15.03.2001

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Patent

PRODUCTION METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

PRODUCTION METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

by UNO, SHOICHI, MACHIDA, SHUNTARO, TOKUNAGA, TAKAFUMI, NOJIRI, KAZUO, TAGO, KAZUTAMI, YUNOGAMI, TAKASHI, MAEKAWA, ATSUSHI
Year of Publication 28.12.2000

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Patent

ION CURRENT DENSITY MEASURING METHOD AND INSTRUMENT, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

ION CURRENT DENSITY MEASURING METHOD AND INSTRUMENT, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

by NOJIRI, KAZUO, ONO, TETSUO, TSUNOKUNI, KAZUYUKI, IKEGAWA, MASATO, MISE, NOBUYUKI, USUI, TATEHITO
Year of Publication 21.09.2000

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Patent

SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND THE MANUFACTURING METHOD THEREOF

SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND THE MANUFACTURING METHOD THEREOF

by IZAWA MASARU, YUNOGAMI TAKASHI, TSUNEKAWA SUKEYOSHI, OONO SHIGERU, NAKAHARA MIWAKO, NAKAMURA YOSHITAKA, SAEKI TOMONORI, ARAI TOSHIYUKI, NOJIRI KAZUO
Year of Publication 30.08.2001

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Patent

Atomic layer etching of GaN and other III-V materials

Atomic layer etching of GaN and other III-V materials

by MARKS, JEFFREY, OHBA, TOMIHITO, KANARIK, KEREN JACOBS, YANG, WEN-BING, NOJIRI, KAZUO, TAN, SAMANTHA
Year of Publication 16.09.2023

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Patent

ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

by MARKS, JEFFREY, YANG, WENBING, OHBA, TOMIHITO, KANARIK, KEREN JACOBS, NOJIRI, KAZUO, TAN, SAMANTHA
Year of Publication 11.07.2023

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Patent

Atomic layer etching of GaN and other III-V materials

Atomic layer etching of GaN and other III-V materials

by Yang, Wenbing, Nojiri, Kazuo, Kanarik, Keren Jacobs, Tan, Samantha, Ohba, Tomihito, Marks, Jeffrey
Year of Publication 21.08.2018

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Patent

Atomic layer etching of GaN and other III-V materials

Atomic layer etching of GaN and other III-V materials

by MARKS, JEFFREY, OHBA, TOMIHITO, KANARIK, KEREN JACOBS, YANG, WEN-BING, NOJIRI, KAZUO, TAN, SAMANTHA
Year of Publication 01.03.2022

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Patent

ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

by MARKS, JEFFREY, YANG, WENBING, OHBA, TOMIHITO, KANARIK, KEREN JACOBS, NOJIRI, KAZUO, TAN, SAMANTHA
Year of Publication 27.01.2017

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Patent

Atomic layer etching of gan and other iii-v materials

Atomic layer etching of gan and other iii-v materials

by MARKS, JEFFREY, YANG, WENBING, OHBA, TOMIHITO, KANARIK, KEREN JACOBS, NOJIRI, KAZUO, TAN, SAMANTHA
Year of Publication 21.12.2021

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Patent

ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

by Kanarik Keren Jacobs, Marks Jeffrey, Nojiri Kazuo, Tan Samantha, Ohba Tomihito, Yang Wenbing
Year of Publication 08.12.2016

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Patent

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