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Year of Publication 01.01.2008
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Inspection method and inspection apparatus
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Year of Publication 01.01.2008
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Year of Publication 01.01.2008
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Method and apparatus for inspecting particles or defects of a semiconductor device
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Year of Publication 08.11.2007
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Year of Publication 19.10.2010
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Method of apparatus for detecting particles on a specimen
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Year of Publication 19.10.2010
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METHOD FOR INSPECTING DEFECT AND APPARATUS FOR INSPECTING DEFECT
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Year of Publication 25.10.2007
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Exposure apparatus and method
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Year of Publication 02.10.2007
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Year of Publication 02.10.2007
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Exposure apparatus and method
Noguchi, Minori, Kenbo, Yukio, Oshida, Yoshitada, Shiba, Masataka, Yoshitaka, Yasuhiro, Murayama, Makoto
Year of Publication 02.10.2007
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Year of Publication 02.10.2007
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Analyses of the Soluble Products of Yubari and Taiheiyo Coals Treated with Zinc and Butyl lodide
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Published in Nippon Kagakukai shi (1972) (01.06.1994)
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Published in Nippon Kagakukai shi (1972) (01.06.1994)
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Method for inspecting defect and apparatus for inspecting defect
NISHIYAMA HIDETOSHI, OHSHIMA YOSHIMASA, JINGU TAKAHIRO, HAMAMATSU AKIRA, NOGUCHI MINORI, UTO SACHIO
Year of Publication 24.07.2007
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Year of Publication 24.07.2007
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Method for inspecting defect and apparatus for inspecting defect
Hamamatsu, Akira, Noguchi, Minori, Nishiyama, Hidetoshi, Ohshima, Yoshimasa, Jingu, Takahiro, Uto, Sachio
Year of Publication 24.07.2007
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Year of Publication 24.07.2007
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