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"NOGAMI, Takafumi"
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"NOGAMI, Takafumi"
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Electrical breakdown of individual Si nanochains and silicide nanochains
by
Kohno, Hideo
,
Nogami
,
Takafumi
,
Takeda, Seiji
,
Ohno, Yutaka
,
Yonenaga, Ichiro
,
Ichikawa, Satoshi
Published in
Journal of nanoscience and nanotechnology
(01.10.2010)
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SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
by
KOTE, Kenichi
,
NOGAMI
,
Takafumi
Year of Publication
27.06.2024
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RECESS FILLING METHOD AND PLASMA TREATMENT DEVICE
by
NOGAMI TAKAFUMI
,
KOTE KENICHI
Year of Publication
27.06.2024
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RECESS FILLING METHOD AND PLASMA TREATMENT DEVICE
by
KOTE, Kenichi
,
NOGAMI
,
Takafumi
Year of Publication
20.06.2024
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METHOD FOR FORMING SiN FILM AND PLASMA PROCESSOR
by
NOGAMI TAKAFUMI
,
KOTE KENICHI
Year of Publication
15.02.2024
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SiN FILM FORMATION METHOD, AND PLASMA TREATMENT APPARATUS
by
KOTE, Kenichi
,
NOGAMI
,
Takafumi
Year of Publication
08.02.2024
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DEPOSITION METHOD AND PLASMA PROCESSING DEVICE
by
NOGAMI TAKAFUMI
,
KOTE KENICHI
Year of Publication
20.12.2023
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MODIFICATION METHOD AND MODIFICATION DEVICE
by
NOGAMI TAKAFUMI
,
KOTE KENICHI
Year of Publication
01.12.2023
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MODIFICATION METHOD AND MODIFICATION DEVICE
by
KOTE, Kenichi
,
NOGAMI
,
Takafumi
Year of Publication
23.11.2023
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PLASMA PROCESSING APPARATUS
by
NOGAMI TAKAFUMI
,
KOTE KENICHI
Year of Publication
13.10.2023
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DEPOSITION METHOD AND PROCESSING DEVICE
by
NOGAMI TAKAFUMI
,
NAKANO YOSHINORI
Year of Publication
22.09.2023
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CLEANING METHOD AND MICROWAVE PLASMA PROCESSOR
by
NOGAMI TAKAFUMI
,
HONDA MINORU
Year of Publication
01.03.2021
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CLEANING METHOD AND MICROWAVE PLASMA TREATMENT DEVICE
by
HONDA, Minoru
,
NOGAMI
,
Takafumi
Year of Publication
25.02.2021
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클리닝 방법 및 플라스마 처리 장치
by
NAKAHATA KENICHI
,
NOGAMI TAKAFUMI
,
NAKANO YOSHIKI
Year of Publication
16.11.2023
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기판 처리 방법, 기판 처리 장치
by
NOGAMI TAKAFUMI
,
KOBAYASHI KAZUI
,
KOTE KENICHI
Year of Publication
21.09.2023
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CLEANING METHOD AND PLASMA PROCESSING APPARATUS
by
HARADA TAMOTSU
,
NOGAMI TAKAFUMI
,
HONDA MINORU
Year of Publication
28.12.2022
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CLEANING METHOD AND PLASMA PROCESSING DEVICE
by
HARADA, Tamotsu
,
HONDA, Minoru
,
NOGAMI
,
Takafumi
Year of Publication
22.12.2022
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CLEANING METHOD AND PLASMA PROCESSING APPARATUS
by
NOGAMI TAKAFUMI
,
NAKANO YOSHINORI
,
KOTE KENICHI
Year of Publication
07.10.2022
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PLASMA TREATMENT DEVICE AND METHOD FOR MANUFACTURING PLASMA TREATMENT DEVICE
by
NOGAMI TAKAFUMI
,
KANEKO HIROYOSHI
Year of Publication
27.06.2019
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PLASMA PROCESSING APPARATUS
by
KANEKO HIROSHI
,
NOGAMI TAKAFUMI
Year of Publication
21.06.2019
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