Reactive Ion Beam Etching and Overgrowth Process in the Fabrication of InGaN Inner Stripe Laser Diodes
Nunoue, Shin-ya, Yamamoto, Masahiro, Suzuki, Mariko, Nozaki, Chiharu, Nishio, Joji, Sugiura, Lisa, Onomura, Masaaki, Itaya, Kazuhiko, Ishikawa, Masayuki
Published in Japanese Journal of Applied Physics (01.03.1998)
Published in Japanese Journal of Applied Physics (01.03.1998)
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Journal Article
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
IIJIMA RYOSUKE, NISHIO JOJI, SHIMIZU TATSUO, OTA CHIHARU, SHINOHE TAKASHI
Year of Publication 30.03.2015
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Year of Publication 30.03.2015
Patent