Method for manufacturing SIMOX wafer and SIMOX wafer
NISHIHATA HIDEKI, KASAMATSU RIYUUSUKE, NAKAMURA SEIICHI, AOKI YOSHIRO
Year of Publication 12.08.2008
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Year of Publication 12.08.2008
Patent
Method for manufacturing SIMOX wafer and SIMOX wafer
Aoki, Yoshiro, Kasamatsu, Riyuusuke, Nishihata, Hideki, Nakamura, Seiichi
Year of Publication 12.08.2008
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Year of Publication 12.08.2008
Patent
Method for producing semiconductor substrate
MURAKAMI, SATOSHI, ENDO, AKIHITO, MORIMOTO, NOBUYUKI, NISHIHATA, HIDEKI
Year of Publication 20.02.2008
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Year of Publication 20.02.2008
Patent