Atomic Force Microscope Observation of the Change in Shape and Subsequent Disappearance of “Crystal-Originated Particles” after Hydrogen-Atmosphere Thermal Annealing
Yanase, Yoshio, Nishihata, Hideki, Ochiai, Takashi, Tsuya, Hideki
Published in Japanese Journal of Applied Physics (01.01.1998)
Published in Japanese Journal of Applied Physics (01.01.1998)
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Journal Article
BONDING WAFER MANUFACTURING METHOD
MORIMOTO, NOBUYUKI, NISHIHATA, HIDEKI, ENDO, AKIHIKO, KUSABA, TATSUMI
Year of Publication 12.03.2009
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Year of Publication 12.03.2009
Patent